Abstract
ZnO is a material suitable for light emission. In order to investigate the light emission properties, ZnO thin films were deposited on (0001) sapphire substrates by pulsed laser deposition (PLD) technique using an Nd:YAG laser with a wavelength of 355 nm. The influence of the deposition parameters, such as oxygen pressure, substrate temperature and laser energy density variation on the properties of the grown film, was studied. The experiment was performed for substrate temperatures in the range 200-600 °C. The deposition chamber was filled with the oxygen at working pressures between 10-6 and 5×10-1 Torr. According to observations, the intensity of the light emission of laser-ablated ZnO thin films increased as substrate temperatures increased from 200 to 600 °C. We investigated the structural, electrical and optical properties of ZnO thin films using X-ray diffraction (XRD), van der Paul Hall measurements, photoluminescence (PL), and Rutherford backscattering spectrometry (RBS).
| Original language | English |
|---|---|
| Pages (from-to) | 458-461 |
| Number of pages | 4 |
| Journal | Applied Surface Science |
| Volume | 154 |
| DOIs | |
| Publication status | Published - 2000 Feb 1 |
| Event | The Symposium A on Photo-Excited Processes, Diagnostics and Applications of the 1999 E-MRS Spring Conference (ICPEPA-3) - Strasbourg, France Duration: 1999 Jun 1 → 1999 Jun 4 |
Bibliographical note
Funding Information:The authors wish to acknowledge the financial support of the Korea Research Foundation made in the program year of 1998.
All Science Journal Classification (ASJC) codes
- General Chemistry
- Condensed Matter Physics
- General Physics and Astronomy
- Surfaces and Interfaces
- Surfaces, Coatings and Films