Properties of chemical vapor deposited ZrC coating layer for TRISO coated fuel particle

Jun Gyu Kim, E. Sul Kum, Doo Jin Choi, Young Woo Lee, Ji Yeon Park

Research output: Contribution to journalArticlepeer-review


The ZrC layer instead of SiC layer is a critical and essential layer in TRISO coated fuel particles since it is a protective layer against diffusion of fission products and provides mechanical strength for the fuel particle. In this study, we carried out computational simulation before actual experiment. With these simulation results, Zirconium carbide (ZrC) films were chemically vapor deposited on ZrO2 substrate using zirconium tetrachloride (ZrCl 4), CH4 as a source and H2 dilution gas, respectively. The change of input gas ratio was correlated with growth rate and morphology of deposited ZrC films. The growth rate of ZrC films increased as the input gas ratio decreased. The microstructure of ZrC films was changed with input gas ratio; small granular type grain structure was exhibited at the low input gas ratio. Angular type structure of increased grain size was observed at the high input gas ratio.

Original languageEnglish
Pages (from-to)580-584
Number of pages5
JournalJournal of the Korean Ceramic Society
Issue number10
Publication statusPublished - 2007 Oct 31

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites


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