Pressure-assisted capillary force lithography

Dahl Young Khang; Hong H. Lee

doi:10.1002/adma.200305673

Pressure-assisted capillary force lithography

Dahl Young Khang, Hong H. Lee

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

52 Citations (Scopus)

Abstract

Pressure-assisted capillary force lithography was introduced using a permeable fluoropolymer material as a mold. Slight pressing when combined with a newly developed experimental set-up ensured conformal contact between the stiff fluoropolymer mold and the substrate. The stiff nature of the mold material made it possible to pattern sub-100 nm features.

Original language	English
Pages (from-to)	176-179
Number of pages	4
Journal	Advanced Materials
Volume	16
Issue number	2
DOIs	https://doi.org/10.1002/adma.200305673
Publication status	Published - 2004 Jan 16

All Science Journal Classification (ASJC) codes

Materials Science(all)
Mechanics of Materials
Mechanical Engineering

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10.1002/adma.200305673

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abstract = "Pressure-assisted capillary force lithography was introduced using a permeable fluoropolymer material as a mold. Slight pressing when combined with a newly developed experimental set-up ensured conformal contact between the stiff fluoropolymer mold and the substrate. The stiff nature of the mold material made it possible to pattern sub-100 nm features.",

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Pressure-assisted capillary force lithography

Abstract

All Science Journal Classification (ASJC) codes

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