Precision fringe metrology using a Fresnel zone plate

Chulmin Joo; G. S. Pati; Carl G. Chen; Paul T. Konkola; Ralf K. Heilmann; Mark L. Schattenburg; Alexander Liddle; Erik H. Anderson

doi:10.1116/1.1523018

Precision fringe metrology using a Fresnel zone plate

Chulmin Joo, G. S. Pati, Carl G. Chen, Paul T. Konkola, Ralf K. Heilmann, Mark L. Schattenburg, Alexander Liddle, Erik H. Anderson

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Abstract

A method to characterize interference fringes is proposed by utilizing a Fresnel zone plate. Through the optical power measurement of the far-field irradiance produced by an image grating and a Fresnel zone plate, the interference fringe periods are obtained. This scheme can be used for a wide range of fringe periods, and may enable achievement of subnanometer fringe characterization with corrected error sources.

Original language	English
Pages (from-to)	3075-3079
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	20
Issue number	6
DOIs	https://doi.org/10.1116/1.1523018
Publication status	Published - 2002 Nov

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.1523018

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abstract = "A method to characterize interference fringes is proposed by utilizing a Fresnel zone plate. Through the optical power measurement of the far-field irradiance produced by an image grating and a Fresnel zone plate, the interference fringe periods are obtained. This scheme can be used for a wide range of fringe periods, and may enable achievement of subnanometer fringe characterization with corrected error sources.",

author = "Chulmin Joo and Pati, {G. S.} and Chen, {Carl G.} and Konkola, {Paul T.} and Heilmann, {Ralf K.} and Schattenburg, {Mark L.} and Alexander Liddle and Anderson, {Erik H.}",

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AU - Joo, Chulmin

AU - Pati, G. S.

AU - Chen, Carl G.

AU - Konkola, Paul T.

AU - Heilmann, Ralf K.

AU - Schattenburg, Mark L.

AU - Liddle, Alexander

AU - Anderson, Erik H.

PY - 2002/11

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N2 - A method to characterize interference fringes is proposed by utilizing a Fresnel zone plate. Through the optical power measurement of the far-field irradiance produced by an image grating and a Fresnel zone plate, the interference fringe periods are obtained. This scheme can be used for a wide range of fringe periods, and may enable achievement of subnanometer fringe characterization with corrected error sources.

AB - A method to characterize interference fringes is proposed by utilizing a Fresnel zone plate. Through the optical power measurement of the far-field irradiance produced by an image grating and a Fresnel zone plate, the interference fringe periods are obtained. This scheme can be used for a wide range of fringe periods, and may enable achievement of subnanometer fringe characterization with corrected error sources.

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JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 6

ER -

Precision fringe metrology using a Fresnel zone plate

Abstract

All Science Journal Classification (ASJC) codes

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