TY - GEN
T1 - Post-processing techniques for the integration of silicon nanowires and MEMS
AU - Englander, Ongi
AU - Christensen, Dane
AU - Kim, Jongbaeg
AU - Lin, Liwei
PY - 2006
Y1 - 2006
N2 - Three post-processing techniques key for the integration of nanostructures and MEMS (Microelectromechanical Systems) are presented. The objective is to develop a toolset for integrated NEMS (Nanoelectromechanical Systems) design and processing. More specifically, experimentation is focused on (1) local contact metallization, (2) global metallization for rapid system functionalization and (3) aqueous treatment of self-assembled and suspended silicon nanowires between two MEMS bridges. These techniques are evaluated for their effectiveness and compatibility with integrated NEMS. It is found that local contact metallization effectively alleviates inherent problems at the nano-to-micro contact, while the aqueous treatment confirms that nanoscale components of the system exhibit similar response as their microscale counterparts. Further, the global metallization process enables rapid functionalization as demonstrated in a hydrogen sensing experiment.
AB - Three post-processing techniques key for the integration of nanostructures and MEMS (Microelectromechanical Systems) are presented. The objective is to develop a toolset for integrated NEMS (Nanoelectromechanical Systems) design and processing. More specifically, experimentation is focused on (1) local contact metallization, (2) global metallization for rapid system functionalization and (3) aqueous treatment of self-assembled and suspended silicon nanowires between two MEMS bridges. These techniques are evaluated for their effectiveness and compatibility with integrated NEMS. It is found that local contact metallization effectively alleviates inherent problems at the nano-to-micro contact, while the aqueous treatment confirms that nanoscale components of the system exhibit similar response as their microscale counterparts. Further, the global metallization process enables rapid functionalization as demonstrated in a hydrogen sensing experiment.
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M3 - Conference contribution
AN - SCOPUS:33750107639
SN - 0780394755
SN - 9780780394759
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 930
EP - 933
BT - 19th IEEE International Conference on Micro Electro Mechanical Systems
T2 - 19th IEEE International Conference on Micro Electro Mechanical Systems
Y2 - 22 January 2006 through 26 January 2006
ER -