Polymer tactile sensing array with a unit cell of multiple capacitors for three-axis contact force image construction

Hyung Kew Lee, Jaehoon Chung, Sun Il Chang, Euisik Yoon

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

In this work, we have implemented a three-axis capacitive tactile sensor using PDMS as a base material. The sensor measures the deformation of PDMS membrane by contact force applied to each cell. In each tactile cell there are four capacitors to decompose the contact force into normal and shear components. In order to measure the shear force, a large bump and a pillar structure have been implemented at the center of the tactile cell structure. The sensor has been realized in an 8×8 array of tactile cells and each tactile cell shows respective responses in all three directions. The full scale range of detectable force has been measured less than 10 mN.

Original languageEnglish
Title of host publicationProceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
Pages623-626
Number of pages4
Publication statusPublished - 2007
Event20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan
Duration: 2007 Jan 212007 Jan 25

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
Country/TerritoryJapan
CityKobe
Period07/1/2107/1/25

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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