Poly(dimethylsiloxane)-based packaging technique for microchip fluorescence detection system applications

Young Hwan Kim, Kyeong Sik Shin, Ji Yoon Kang, Eun Gyeong Yang, Kyeong Kap Paek, Dae Shik Seo, Byeong Kwon Ju

Research output: Contribution to journalArticlepeer-review

28 Citations (Scopus)


A simplified integration process including packaging is presented, which enables the realization of the portable fluorescence detection system. A fluorescence detection microchip system consisting of an integrated p-i-n photodiode, an organic light-emitting diode as the light source, an interference filter, and a microchannel was developed. The on-chip fluorescence detector fabricated by poly(dimethylsiloxane) (PDMS)-based packaging had a thin-film structure. A silicon-based integrated p-i-n photodiode combined with an optical filter removed the background noise, which was produced by an excitation source, on the same substrate. The active area of the finger-type p-i-n photodiode was extended to obtain a higher detection sensitivity of fluorescence. The sensitivity and the limit of detection (LOD;S/N = 3) of the system were 0.198 nA/μM and 10μM, respectively.

Original languageEnglish
Pages (from-to)1152-1158
Number of pages7
JournalJournal of Microelectromechanical Systems
Issue number5
Publication statusPublished - 2006 Oct

Bibliographical note

Funding Information:
Manuscript received October 17, 2005; revised February 11, 2006. This work was supported in part by the Intelligent Microsystem Center (IMC; http://www. microsystem.re.kr), which carries out one of the 21st century’s Frontier R&D Projects sponsored by the Korea Ministry of Commerce, Industry and Energy, and by the National Research Laboratory under Program M1-0412-00-0008. Subject Editor G. Stemme.

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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