Traditionally, scanning probe lithography tools are limited in resolution by the radius of curvature of the tip used. Herein, an approach is described for patterning the ridge of piled-up polymer that naturally occurs when a scanning probe is pressed against a soft surface. The use of this phenomenon to transfer patterns to hard materials with 20 nm resolution is demonstrated.
|Number of pages||5|
|Publication status||Published - 2013 Sept 23|
All Science Journal Classification (ASJC) codes
- Materials Science(all)