Plow and ridge nanofabrication

Wooyoung Shim; Keith A. Brown; Xiaozhu Zhou; Boris Rasin; Xing Liao; Abrin L. Schmucker; Chad A. Mirkin

doi:10.1002/smll.201203014

Plow and ridge nanofabrication

Wooyoung Shim, Keith A. Brown, Xiaozhu Zhou, Boris Rasin, Xing Liao, Abrin L. Schmucker, Chad A. Mirkin

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

Traditionally, scanning probe lithography tools are limited in resolution by the radius of curvature of the tip used. Herein, an approach is described for patterning the ridge of piled-up polymer that naturally occurs when a scanning probe is pressed against a soft surface. The use of this phenomenon to transfer patterns to hard materials with 20 nm resolution is demonstrated.

Original language	English
Pages (from-to)	3058-3062
Number of pages	5
Journal	Small
Volume	9
Issue number	18
DOIs	https://doi.org/10.1002/smll.201203014
Publication status	Published - 2013 Sept 23

All Science Journal Classification (ASJC) codes

Biotechnology
Biomaterials
Chemistry(all)
Materials Science(all)

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10.1002/smll.201203014

Cite this

@article{b4aca5b21ae24942955df25f35376740,

title = "Plow and ridge nanofabrication",

abstract = "Traditionally, scanning probe lithography tools are limited in resolution by the radius of curvature of the tip used. Herein, an approach is described for patterning the ridge of piled-up polymer that naturally occurs when a scanning probe is pressed against a soft surface. The use of this phenomenon to transfer patterns to hard materials with 20 nm resolution is demonstrated.",

author = "Wooyoung Shim and Brown, {Keith A.} and Xiaozhu Zhou and Boris Rasin and Xing Liao and Schmucker, {Abrin L.} and Mirkin, {Chad A.}",

year = "2013",

month = sep,

day = "23",

doi = "10.1002/smll.201203014",

language = "English",

volume = "9",

pages = "3058--3062",

journal = "Small",

issn = "1613-6810",

publisher = "Wiley-VCH Verlag",

number = "18",

}

TY - JOUR

T1 - Plow and ridge nanofabrication

AU - Shim, Wooyoung

AU - Brown, Keith A.

AU - Zhou, Xiaozhu

AU - Rasin, Boris

AU - Liao, Xing

AU - Schmucker, Abrin L.

AU - Mirkin, Chad A.

PY - 2013/9/23

Y1 - 2013/9/23

N2 - Traditionally, scanning probe lithography tools are limited in resolution by the radius of curvature of the tip used. Herein, an approach is described for patterning the ridge of piled-up polymer that naturally occurs when a scanning probe is pressed against a soft surface. The use of this phenomenon to transfer patterns to hard materials with 20 nm resolution is demonstrated.

AB - Traditionally, scanning probe lithography tools are limited in resolution by the radius of curvature of the tip used. Herein, an approach is described for patterning the ridge of piled-up polymer that naturally occurs when a scanning probe is pressed against a soft surface. The use of this phenomenon to transfer patterns to hard materials with 20 nm resolution is demonstrated.

UR - http://www.scopus.com/inward/record.url?scp=84884265675&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84884265675&partnerID=8YFLogxK

U2 - 10.1002/smll.201203014

DO - 10.1002/smll.201203014

M3 - Article

C2 - 23427089

AN - SCOPUS:84884265675

SN - 1613-6810

VL - 9

SP - 3058

EP - 3062

JO - Small

JF - Small

IS - 18

ER -

Plow and ridge nanofabrication

Abstract

All Science Journal Classification (ASJC) codes

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