Plastic deformation of microstructures using carbon nanotubes film as latching surface

Y. Eun; J. I. Lee; J. Choi; Y. Song; J. Kim

doi:10.1109/TRANSDUCERS.2011.5969807

Plastic deformation of microstructures using carbon nanotubes film as latching surface

Y. Eun, J. I. Lee, J. Choi, Y. Song, J. Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

We have demonstrated a novel method utilizing carbon nanotube (CNT) arrays as latching surface for silicon plastic deformation applications where the high temperature process is required. The CNT arrays integrated on microstructures maintain the strained shapes of the microstructures in the high temperature environments. In order to demonstrate the proposed method, arrays of angular vertical comb-drive (AVC) actuators were successfully fabricated by the silicon plastic deformation process while the CNTs anchored the strained microstructures. After the process, the CNTs were fully removable by thermal oxidation. The proposed method could be applied to diverse microelectro- mechanical systems (MEMS) for microscale assembly and harsh environment processing.

Original language	English
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	1626-1629
Number of pages	4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969807
Publication status	Published - 2011
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: 2011 Jun 5 → 2011 Jun 9

Publication series

Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/Territory	China
City	Beijing
Period	11/6/5 → 11/6/9

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/TRANSDUCERS.2011.5969807

Cite this

Eun, Y., Lee, J. I., Choi, J., Song, Y., & Kim, J. (2011). Plastic deformation of microstructures using carbon nanotubes film as latching surface. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1626-1629). Article 5969807 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969807

@inproceedings{e9e033f83c29451992f7724f96edb80e,

title = "Plastic deformation of microstructures using carbon nanotubes film as latching surface",

abstract = "We have demonstrated a novel method utilizing carbon nanotube (CNT) arrays as latching surface for silicon plastic deformation applications where the high temperature process is required. The CNT arrays integrated on microstructures maintain the strained shapes of the microstructures in the high temperature environments. In order to demonstrate the proposed method, arrays of angular vertical comb-drive (AVC) actuators were successfully fabricated by the silicon plastic deformation process while the CNTs anchored the strained microstructures. After the process, the CNTs were fully removable by thermal oxidation. The proposed method could be applied to diverse microelectro- mechanical systems (MEMS) for microscale assembly and harsh environment processing.",

author = "Y. Eun and Lee, {J. I.} and J. Choi and Y. Song and J. Kim",

year = "2011",

doi = "10.1109/TRANSDUCERS.2011.5969807",

language = "English",

isbn = "9781457701573",

series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

pages = "1626--1629",

booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",

}

Eun, Y, Lee, JI, Choi, J, Song, Y & Kim, J 2011, Plastic deformation of microstructures using carbon nanotubes film as latching surface. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969807, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 1626-1629, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 11/6/5. https://doi.org/10.1109/TRANSDUCERS.2011.5969807

Plastic deformation of microstructures using carbon nanotubes film as latching surface. / Eun, Y.; Lee, J. I.; Choi, J. et al.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1626-1629 5969807 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Plastic deformation of microstructures using carbon nanotubes film as latching surface

AU - Eun, Y.

AU - Lee, J. I.

AU - Choi, J.

AU - Song, Y.

AU - Kim, J.

PY - 2011

Y1 - 2011

N2 - We have demonstrated a novel method utilizing carbon nanotube (CNT) arrays as latching surface for silicon plastic deformation applications where the high temperature process is required. The CNT arrays integrated on microstructures maintain the strained shapes of the microstructures in the high temperature environments. In order to demonstrate the proposed method, arrays of angular vertical comb-drive (AVC) actuators were successfully fabricated by the silicon plastic deformation process while the CNTs anchored the strained microstructures. After the process, the CNTs were fully removable by thermal oxidation. The proposed method could be applied to diverse microelectro- mechanical systems (MEMS) for microscale assembly and harsh environment processing.

AB - We have demonstrated a novel method utilizing carbon nanotube (CNT) arrays as latching surface for silicon plastic deformation applications where the high temperature process is required. The CNT arrays integrated on microstructures maintain the strained shapes of the microstructures in the high temperature environments. In order to demonstrate the proposed method, arrays of angular vertical comb-drive (AVC) actuators were successfully fabricated by the silicon plastic deformation process while the CNTs anchored the strained microstructures. After the process, the CNTs were fully removable by thermal oxidation. The proposed method could be applied to diverse microelectro- mechanical systems (MEMS) for microscale assembly and harsh environment processing.

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U2 - 10.1109/TRANSDUCERS.2011.5969807

DO - 10.1109/TRANSDUCERS.2011.5969807

M3 - Conference contribution

AN - SCOPUS:80052129479

SN - 9781457701573

T3 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

SP - 1626

EP - 1629

BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

T2 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Y2 - 5 June 2011 through 9 June 2011

ER -

Eun Y, Lee JI, Choi J, Song Y, Kim J. Plastic deformation of microstructures using carbon nanotubes film as latching surface. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1626-1629. 5969807. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). doi: 10.1109/TRANSDUCERS.2011.5969807

Plastic deformation of microstructures using carbon nanotubes film as latching surface

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