Plasma Process Uniformity Diagnosis Technique Using Optical Emission Spectroscopy With Spatially Resolved Ring Lens

In Joong Kim, Ilgu Yun

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

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Immunology and Microbiology

Biochemistry, Genetics and Molecular Biology

Physics

Medicine and Dentistry

Nursing and Health Professions