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Plasma Process Uniformity Diagnosis Technique Using Optical Emission Spectroscopy With Spatially Resolved Ring Lens
In Joong Kim,
Ilgu Yun
Department of Electrical and Electronic Engineering
Research output
:
Contribution to journal
›
Article
›
peer-review
10
Citations (Scopus)
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Dive into the research topics of 'Plasma Process Uniformity Diagnosis Technique Using Optical Emission Spectroscopy With Spatially Resolved Ring Lens'. Together they form a unique fingerprint.
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Immunology and Microbiology
Blood Plasma
77%
Light
44%
Optics
33%
Lens
33%
Light Intensity
22%
Biochemistry, Genetics and Molecular Biology
Emission Spectroscopy
100%
Light
44%
Optics
33%
Light Intensity
22%
Physics
Optical Emission Spectroscopy
33%
Light
33%
Plasma Process
33%
Luminous Intensity
22%
Distortion
11%
Light Sources
11%
Plasma Diagnostics
11%
Region
11%
Distance
11%
Diagnosis
11%
Medicine and Dentistry
Plasma
77%
Diagnosis
22%
Nursing and Health Professions
Diagnosis
22%
Procedures
22%