TY - GEN
T1 - Planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coils
AU - Ahn, Chong H.
AU - Kim, Yong J.
AU - Allen, Mark G.
PY - 1993
Y1 - 1993
N2 - A new, fully functional, electrically excited planar variable reluctance magnetic micromotor has been demonstrated on a silicon wafer. The motor uses a micromachined nickel-iron rotor and a fully integrated stator, in which a new toroidal-meander type integrated inductive component is used for flux generation. To reduce the magnetic reluctance in the stator, a modified stator geometry was adopted which removes the yoke which is used in a conventional reluctance motor. Using polyimide as both an integral structural material and as an electroplating mold, a 40 μm thick nickel-iron rotor 500 μm in diameter was micro-assembled onto a fully integrated nickel-iron stator 120 μm in thickness. When 500 mA of current was applied to each stator, 12° of rotation (1 stroke in this motor) was observed. By applying three phase 200 mA current pulses to the stators, rotation of the rotor was observed. The speed and direction of the rotation could be adjusted by changing the frequency and phase firing order of the power supply respectively. Continuous rotor rotation was observed at speeds up to 500 rpm; this speed limitation was solely due to the limitation of the maximum frequency of the controller used. The predicted torque for the fabricated micromotor at 500 mA driving current was calculated to be 1.2 (μmN-m).
AB - A new, fully functional, electrically excited planar variable reluctance magnetic micromotor has been demonstrated on a silicon wafer. The motor uses a micromachined nickel-iron rotor and a fully integrated stator, in which a new toroidal-meander type integrated inductive component is used for flux generation. To reduce the magnetic reluctance in the stator, a modified stator geometry was adopted which removes the yoke which is used in a conventional reluctance motor. Using polyimide as both an integral structural material and as an electroplating mold, a 40 μm thick nickel-iron rotor 500 μm in diameter was micro-assembled onto a fully integrated nickel-iron stator 120 μm in thickness. When 500 mA of current was applied to each stator, 12° of rotation (1 stroke in this motor) was observed. By applying three phase 200 mA current pulses to the stators, rotation of the rotor was observed. The speed and direction of the rotation could be adjusted by changing the frequency and phase firing order of the power supply respectively. Continuous rotor rotation was observed at speeds up to 500 rpm; this speed limitation was solely due to the limitation of the maximum frequency of the controller used. The predicted torque for the fabricated micromotor at 500 mA driving current was calculated to be 1.2 (μmN-m).
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M3 - Conference contribution
AN - SCOPUS:0027187555
SN - 0780309588
T3 - IEEE Micro Electro Mechanical Systems
SP - 1
EP - 6
BT - IEEE Micro Electro Mechanical Systems
PB - Publ by IEEE
T2 - Proceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS
Y2 - 7 February 1993 through 10 February 1993
ER -