Piezoelectric properties of highly densified 0.01Pb (Mg1/2W 1/2)O3-0.41Pb (Ni1/3Nb2/3)O 3-0.35PbTiO3-0.23PbZrO3+0.1 wt% Y 2O3+1.5 wt% ZnO thick films on alumina substrate

Tae Hee Shin; Jong Yoon Ha; Hyun Cheol Song; Seok Jin Yoon; Hyung Ho Park; Ji Won Choi

doi:10.1016/j.ceramint.2012.07.068

Piezoelectric properties of highly densified 0.01Pb (Mg_1/2W _1/2)O₃-0.41Pb (Ni_1/3Nb_2/3)O ₃-0.35PbTiO₃-0.23PbZrO₃+0.1 wt% Y ₂O₃+1.5 wt% ZnO thick films on alumina substrate

Tae Hee Shin, Jong Yoon Ha, Hyun Cheol Song, Seok Jin Yoon, Hyung Ho Park, Ji Won Choi

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

This paper reports on the formation of highly densified piezoelectric thick films of 0.01Pb(Mg_1/2W_1/2)O₃-0.41Pb(Ni _1/3Nb_2/3)O₃-0.35PbTiO₃-0. 23PbZrO₃+0.1 wt% Y₂O₃+1.5 wt% ZnO (PMW-PNN-PT-PZ+YZ) on alumina substrate by the screen-printing method. To increase the packing density of powder in screen-printing paste, attrition milled nano-scale powder was mixed with ball milled micro-scale powder, while the particle size distribution was properly controlled. Furthermore, the cold isostatic pressing process was used to improve the green density of the piezoelectric thick films. As a result of these processes, the PMW-PNN-PT-PZ+YZ thick film, sintered at 890 °C for 2 h, showed enhanced piezoelectric properties such as P_r=42 μC/cm², E_c=25 kV/cm, and d₃₃=100 pC/N, in comparison with other reports. Such prominent piezoelectric properties of PMW-PNN-PT-PZ+YZ thick films using bi-modal particle distribution and the CIP process can be applied to functional thick films in MEMS applications such as micro actuators and sensors.

Original language	English
Pages (from-to)	1327-1333
Number of pages	7
Journal	Ceramics International
Volume	39
Issue number	2
DOIs	https://doi.org/10.1016/j.ceramint.2012.07.068
Publication status	Published - 2013 Mar

Bibliographical note

Funding Information:
This work was financially supported by the 21st Century’s Frontier R & D program and KIST Future Resource Program .

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Process Chemistry and Technology
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/j.ceramint.2012.07.068

Cite this

@article{27420e68058846399ea086aa19ae0a83,

title = "Piezoelectric properties of highly densified 0.01Pb (Mg1/2W 1/2)O3-0.41Pb (Ni1/3Nb2/3)O 3-0.35PbTiO3-0.23PbZrO3+0.1 wt% Y 2O3+1.5 wt% ZnO thick films on alumina substrate",

abstract = "This paper reports on the formation of highly densified piezoelectric thick films of 0.01Pb(Mg1/2W1/2)O3-0.41Pb(Ni 1/3Nb2/3)O3-0.35PbTiO3-0. 23PbZrO3+0.1 wt% Y2O3+1.5 wt% ZnO (PMW-PNN-PT-PZ+YZ) on alumina substrate by the screen-printing method. To increase the packing density of powder in screen-printing paste, attrition milled nano-scale powder was mixed with ball milled micro-scale powder, while the particle size distribution was properly controlled. Furthermore, the cold isostatic pressing process was used to improve the green density of the piezoelectric thick films. As a result of these processes, the PMW-PNN-PT-PZ+YZ thick film, sintered at 890 °C for 2 h, showed enhanced piezoelectric properties such as Pr=42 μC/cm2, Ec=25 kV/cm, and d33=100 pC/N, in comparison with other reports. Such prominent piezoelectric properties of PMW-PNN-PT-PZ+YZ thick films using bi-modal particle distribution and the CIP process can be applied to functional thick films in MEMS applications such as micro actuators and sensors.",

author = "Shin, {Tae Hee} and Ha, {Jong Yoon} and Song, {Hyun Cheol} and Yoon, {Seok Jin} and Park, {Hyung Ho} and Choi, {Ji Won}",

note = "Funding Information: This work was financially supported by the 21st Century{\textquoteright}s Frontier R & D program and KIST Future Resource Program . ",

year = "2013",

month = mar,

doi = "10.1016/j.ceramint.2012.07.068",

language = "English",

volume = "39",

pages = "1327--1333",

journal = "Ceramics International",

issn = "0272-8842",

publisher = "Elsevier Limited",

number = "2",

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T1 - Piezoelectric properties of highly densified 0.01Pb (Mg1/2W 1/2)O3-0.41Pb (Ni1/3Nb2/3)O 3-0.35PbTiO3-0.23PbZrO3+0.1 wt% Y 2O3+1.5 wt% ZnO thick films on alumina substrate

AU - Shin, Tae Hee

AU - Ha, Jong Yoon

AU - Song, Hyun Cheol

AU - Yoon, Seok Jin

AU - Park, Hyung Ho

AU - Choi, Ji Won

N1 - Funding Information: This work was financially supported by the 21st Century’s Frontier R & D program and KIST Future Resource Program .

PY - 2013/3

Y1 - 2013/3

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AB - This paper reports on the formation of highly densified piezoelectric thick films of 0.01Pb(Mg1/2W1/2)O3-0.41Pb(Ni 1/3Nb2/3)O3-0.35PbTiO3-0. 23PbZrO3+0.1 wt% Y2O3+1.5 wt% ZnO (PMW-PNN-PT-PZ+YZ) on alumina substrate by the screen-printing method. To increase the packing density of powder in screen-printing paste, attrition milled nano-scale powder was mixed with ball milled micro-scale powder, while the particle size distribution was properly controlled. Furthermore, the cold isostatic pressing process was used to improve the green density of the piezoelectric thick films. As a result of these processes, the PMW-PNN-PT-PZ+YZ thick film, sintered at 890 °C for 2 h, showed enhanced piezoelectric properties such as Pr=42 μC/cm2, Ec=25 kV/cm, and d33=100 pC/N, in comparison with other reports. Such prominent piezoelectric properties of PMW-PNN-PT-PZ+YZ thick films using bi-modal particle distribution and the CIP process can be applied to functional thick films in MEMS applications such as micro actuators and sensors.

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