Photosensitive terpolymer for all-wet-etching process: Material characterization and device fabrication

Abderrafia Moujoud; Sungho Kang; Hyun Jae Kim; Mark Andrews

doi:10.1016/j.tsf.2009.08.024

Photosensitive terpolymer for all-wet-etching process: Material characterization and device fabrication

Abderrafia Moujoud, Sungho Kang, Hyun Jae Kim, Mark Andrews

Department of Electrical and Electronic Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

A photosensitive terpolymeric composition suitable for practical waveguide devices is provided. The terpolymer was produced from pentafluorostyrene, perfluoro-n-octyl acrylate, and glycidyl methacrylate. We present a fabrication process where the device structure utilizes the same class of material for the core and cladding layers and it was fabricated without a plasma etching process. Based on the developed material and process; a 16-channel arrayed waveguide grating with good performance has been realized. During temperature cycling, a slight thickness hysteresis and refractive index hysteresis was observed above the glass transition temperature and is ascribed to the fact that the terpolymer material may not completely recover its elasticity in the heating/cooling cycle.

Original language	English
Pages (from-to)	2147-2151
Number of pages	5
Journal	Thin Solid Films
Volume	518
Issue number	8
DOIs	https://doi.org/10.1016/j.tsf.2009.08.024
Publication status	Published - 2010 Feb 1

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2009.08.024

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title = "Photosensitive terpolymer for all-wet-etching process: Material characterization and device fabrication",

abstract = "A photosensitive terpolymeric composition suitable for practical waveguide devices is provided. The terpolymer was produced from pentafluorostyrene, perfluoro-n-octyl acrylate, and glycidyl methacrylate. We present a fabrication process where the device structure utilizes the same class of material for the core and cladding layers and it was fabricated without a plasma etching process. Based on the developed material and process; a 16-channel arrayed waveguide grating with good performance has been realized. During temperature cycling, a slight thickness hysteresis and refractive index hysteresis was observed above the glass transition temperature and is ascribed to the fact that the terpolymer material may not completely recover its elasticity in the heating/cooling cycle.",

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T2 - Material characterization and device fabrication

AU - Moujoud, Abderrafia

AU - Kang, Sungho

AU - Kim, Hyun Jae

AU - Andrews, Mark

PY - 2010/2/1

Y1 - 2010/2/1

N2 - A photosensitive terpolymeric composition suitable for practical waveguide devices is provided. The terpolymer was produced from pentafluorostyrene, perfluoro-n-octyl acrylate, and glycidyl methacrylate. We present a fabrication process where the device structure utilizes the same class of material for the core and cladding layers and it was fabricated without a plasma etching process. Based on the developed material and process; a 16-channel arrayed waveguide grating with good performance has been realized. During temperature cycling, a slight thickness hysteresis and refractive index hysteresis was observed above the glass transition temperature and is ascribed to the fact that the terpolymer material may not completely recover its elasticity in the heating/cooling cycle.

AB - A photosensitive terpolymeric composition suitable for practical waveguide devices is provided. The terpolymer was produced from pentafluorostyrene, perfluoro-n-octyl acrylate, and glycidyl methacrylate. We present a fabrication process where the device structure utilizes the same class of material for the core and cladding layers and it was fabricated without a plasma etching process. Based on the developed material and process; a 16-channel arrayed waveguide grating with good performance has been realized. During temperature cycling, a slight thickness hysteresis and refractive index hysteresis was observed above the glass transition temperature and is ascribed to the fact that the terpolymer material may not completely recover its elasticity in the heating/cooling cycle.

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JO - Thin Solid Films

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Photosensitive terpolymer for all-wet-etching process: Material characterization and device fabrication

Abstract

All Science Journal Classification (ASJC) codes

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