TY - GEN
T1 - Photoresponse characteristics of vertically aligned ZnO nanowires
AU - Kar, J. P.
AU - Das, S. N.
AU - Choi, J. H.
AU - Lee, T. I.
AU - Myoung, J. M.
PY - 2010
Y1 - 2010
N2 - In this study, vertically aligned ZnO nanowires were grown by metal organic chemical vapor deposition (MOCVD) method. The growth direction of vertically aligned nanowires was along c-axis. For monolithic integration, vertically aligned ZnO nanowires were grown on AlN/Si substrates with a higher aspect ratio in comparison to those on bare silicon substrates. In a separate experiment, micro-patterning of the nanowires was obtained by lift-off technique, where BaF2 film was used as a sacrificial layer. ZnO nanowires based UV detectors were fabricated using silicon microchannel. Nanowires with higher aspect ratio exhibited the highest on-off current ratio and less photoresponse time.
AB - In this study, vertically aligned ZnO nanowires were grown by metal organic chemical vapor deposition (MOCVD) method. The growth direction of vertically aligned nanowires was along c-axis. For monolithic integration, vertically aligned ZnO nanowires were grown on AlN/Si substrates with a higher aspect ratio in comparison to those on bare silicon substrates. In a separate experiment, micro-patterning of the nanowires was obtained by lift-off technique, where BaF2 film was used as a sacrificial layer. ZnO nanowires based UV detectors were fabricated using silicon microchannel. Nanowires with higher aspect ratio exhibited the highest on-off current ratio and less photoresponse time.
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U2 - 10.1109/INEC.2010.5425109
DO - 10.1109/INEC.2010.5425109
M3 - Conference contribution
AN - SCOPUS:77951656392
SN - 9781424435449
T3 - INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings
SP - 951
EP - 952
BT - INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings
T2 - 2010 3rd International Nanoelectronics Conference, INEC 2010
Y2 - 3 January 2010 through 8 January 2010
ER -