Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition

Chang Soo Lee; Jungwon Kim; J. Y. Son; Wonyong Choi; Hyungjun Kim

doi:10.1016/j.apcatb.2009.06.037

Photocatalytic functional coatings of TiO₂ thin films on polymer substrate by plasma enhanced atomic layer deposition

Chang Soo Lee, Jungwon Kim, J. Y. Son, Wonyong Choi, Hyungjun Kim

Department of Electrical and Electronic Engineering

Research output: Contribution to journal › Article › peer-review

68 Citations (Scopus)

Abstract

We prepared photocatalytic TiO₂ thin films which exhibited relatively high growth rate and low impurity on polymer substrate by plasma enhanced atomic layer deposition (PE-ALD) from Ti(NMe₂)₄ [tetrakis (dimethylamido) Ti, TDMAT] and O₂ plasma to show the self-cleaning effect. The TiO₂ thin films with anatase phase and bandgap energy about 3.3 eV were deposited at growth temperature of 250 °C and the photocatalytic effects were compared with commercial Activ glass. From contact angles measurement of water droplet and photo-induced degradation test of organic liquid, TiO₂ thin films with anatase phases showed superhydrophilic phenomena and decomposed organic liquid after UV irradiation. The anatase TiO₂ thin film on polymer substrate showed highest photocatalytic efficiency after 5 h UV irradiation. We attribute the highest photocatalytic efficiency of TiO₂ thin film with anatase structure to the formation of suitable crystalline phase and large surface area.

Original language	English
Pages (from-to)	628-633
Number of pages	6
Journal	Applied Catalysis B: Environmental
Volume	91
Issue number	3-4
DOIs	https://doi.org/10.1016/j.apcatb.2009.06.037
Publication status	Published - 2009 Sept 28

Bibliographical note

Funding Information:
This work was supported by the Korea Research Foundation Grant funded by the Korean Government (MOEHRD) (KRF-2008-005-J00501) and Korea Ministry of Commerce, Industry and Energy (System IC 2010, Commercialization Program of Nano Process Equipments). And one of the authors (Chang-Soo Lee) was financially supported by the second stage of the Brain Korea 21 project in 2008.

All Science Journal Classification (ASJC) codes

Catalysis
Environmental Science(all)
Process Chemistry and Technology

Access to Document

10.1016/j.apcatb.2009.06.037

Cite this

@article{18a08bde1d314ac8bcff741c434bfd27,

title = "Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition",

abstract = "We prepared photocatalytic TiO2 thin films which exhibited relatively high growth rate and low impurity on polymer substrate by plasma enhanced atomic layer deposition (PE-ALD) from Ti(NMe2)4 [tetrakis (dimethylamido) Ti, TDMAT] and O2 plasma to show the self-cleaning effect. The TiO2 thin films with anatase phase and bandgap energy about 3.3 eV were deposited at growth temperature of 250 °C and the photocatalytic effects were compared with commercial Activ glass. From contact angles measurement of water droplet and photo-induced degradation test of organic liquid, TiO2 thin films with anatase phases showed superhydrophilic phenomena and decomposed organic liquid after UV irradiation. The anatase TiO2 thin film on polymer substrate showed highest photocatalytic efficiency after 5 h UV irradiation. We attribute the highest photocatalytic efficiency of TiO2 thin film with anatase structure to the formation of suitable crystalline phase and large surface area.",

author = "Lee, {Chang Soo} and Jungwon Kim and Son, {J. Y.} and Wonyong Choi and Hyungjun Kim",

note = "Funding Information: This work was supported by the Korea Research Foundation Grant funded by the Korean Government (MOEHRD) (KRF-2008-005-J00501) and Korea Ministry of Commerce, Industry and Energy (System IC 2010, Commercialization Program of Nano Process Equipments). And one of the authors (Chang-Soo Lee) was financially supported by the second stage of the Brain Korea 21 project in 2008.",

year = "2009",

month = sep,

day = "28",

doi = "10.1016/j.apcatb.2009.06.037",

language = "English",

volume = "91",

pages = "628--633",

journal = "Applied Catalysis B: Environmental",

issn = "0926-3373",

publisher = "Elsevier",

number = "3-4",

}

TY - JOUR

T1 - Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition

AU - Lee, Chang Soo

AU - Kim, Jungwon

AU - Son, J. Y.

AU - Choi, Wonyong

AU - Kim, Hyungjun

N1 - Funding Information: This work was supported by the Korea Research Foundation Grant funded by the Korean Government (MOEHRD) (KRF-2008-005-J00501) and Korea Ministry of Commerce, Industry and Energy (System IC 2010, Commercialization Program of Nano Process Equipments). And one of the authors (Chang-Soo Lee) was financially supported by the second stage of the Brain Korea 21 project in 2008.

PY - 2009/9/28

Y1 - 2009/9/28

N2 - We prepared photocatalytic TiO2 thin films which exhibited relatively high growth rate and low impurity on polymer substrate by plasma enhanced atomic layer deposition (PE-ALD) from Ti(NMe2)4 [tetrakis (dimethylamido) Ti, TDMAT] and O2 plasma to show the self-cleaning effect. The TiO2 thin films with anatase phase and bandgap energy about 3.3 eV were deposited at growth temperature of 250 °C and the photocatalytic effects were compared with commercial Activ glass. From contact angles measurement of water droplet and photo-induced degradation test of organic liquid, TiO2 thin films with anatase phases showed superhydrophilic phenomena and decomposed organic liquid after UV irradiation. The anatase TiO2 thin film on polymer substrate showed highest photocatalytic efficiency after 5 h UV irradiation. We attribute the highest photocatalytic efficiency of TiO2 thin film with anatase structure to the formation of suitable crystalline phase and large surface area.

AB - We prepared photocatalytic TiO2 thin films which exhibited relatively high growth rate and low impurity on polymer substrate by plasma enhanced atomic layer deposition (PE-ALD) from Ti(NMe2)4 [tetrakis (dimethylamido) Ti, TDMAT] and O2 plasma to show the self-cleaning effect. The TiO2 thin films with anatase phase and bandgap energy about 3.3 eV were deposited at growth temperature of 250 °C and the photocatalytic effects were compared with commercial Activ glass. From contact angles measurement of water droplet and photo-induced degradation test of organic liquid, TiO2 thin films with anatase phases showed superhydrophilic phenomena and decomposed organic liquid after UV irradiation. The anatase TiO2 thin film on polymer substrate showed highest photocatalytic efficiency after 5 h UV irradiation. We attribute the highest photocatalytic efficiency of TiO2 thin film with anatase structure to the formation of suitable crystalline phase and large surface area.

UR - http://www.scopus.com/inward/record.url?scp=68749092796&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=68749092796&partnerID=8YFLogxK

U2 - 10.1016/j.apcatb.2009.06.037

DO - 10.1016/j.apcatb.2009.06.037

M3 - Article

AN - SCOPUS:68749092796

SN - 0926-3373

VL - 91

SP - 628

EP - 633

JO - Applied Catalysis B: Environmental

JF - Applied Catalysis B: Environmental

IS - 3-4

ER -