Performance comparison of 5GHz VCOs integrated by CMOS compatible high Q MEMS inductors

Eun Chul Park, Sang Hyun Baek, Taek Sang Song, Jun Bo Yoon, Euisik Yoon

Research output: Contribution to journalConference articlepeer-review

23 Citations (Scopus)


In this paper we report the performance comparison of 5GHz CMOS VCOs fabricated by 0.18μm six-metal mixed-mode RF CMOS processes with respect to the same VCOs integrated with high Q MEMS inductors. The CMOS inductors implemented by a top-level 2μm-thick AI/Cu metal layer typically show Q factors of about 10, while the MEMS inductors can give much higher Q factors over 25. Differential CMOS VCO circuits have been optimally designed for the respective Q factors of both CMOS and MEMS inductors. Phase noise has been measured and compared for the fabricated VCOs, demonstrating that the VCOs with MEMS inductors can give better phase noise by more than 7dB in the offset frequency range from 30kHz to 3MHz.

Original languageEnglish
Pages (from-to)721-724
Number of pages4
JournalIEEE MTT-S International Microwave Symposium Digest
Publication statusPublished - 2003
Event2003 IEEE MTT-S International Microwave Symposium Digest - Philadelphia, PA, United States
Duration: 2003 Jun 82003 Jun 13

All Science Journal Classification (ASJC) codes

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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