Patterning of polymer thin films

P. J. Yoo; K. Y. Suh; Y. S. Kim; D. Y. Khang; H. H. Lee

doi:10.1533/9781845690908.155

Patterning of polymer thin films

P. J. Yoo, K. Y. Suh, Y. S. Kim, D. Y. Khang, H. H. Lee

Department of Materials Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Chapter

1 Citation (Scopus)

Original language	English
Title of host publication	Nanolithography and Patterning Techniques in Microelectronics
Publisher	Elsevier Ltd
Pages	155-183
Number of pages	29
ISBN (Print)	9781855739314
DOIs	https://doi.org/10.1533/9781845690908.155
Publication status	Published - 2005 Sept

All Science Journal Classification (ASJC) codes

Engineering(all)

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10.1533/9781845690908.155

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@inbook{8858da6f6f6e4e8f81fd3363aa5cce27,

title = "Patterning of polymer thin films",

author = "Yoo, {P. J.} and Suh, {K. Y.} and Kim, {Y. S.} and Khang, {D. Y.} and Lee, {H. H.}",

year = "2005",

month = sep,

doi = "10.1533/9781845690908.155",

language = "English",

isbn = "9781855739314",

pages = "155--183",

booktitle = "Nanolithography and Patterning Techniques in Microelectronics",

publisher = "Elsevier Ltd",

}

TY - CHAP

T1 - Patterning of polymer thin films

AU - Yoo, P. J.

AU - Suh, K. Y.

AU - Kim, Y. S.

AU - Khang, D. Y.

AU - Lee, H. H.

PY - 2005/9

Y1 - 2005/9

UR - http://www.scopus.com/inward/record.url?scp=84902613119&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84902613119&partnerID=8YFLogxK

U2 - 10.1533/9781845690908.155

DO - 10.1533/9781845690908.155

M3 - Chapter

AN - SCOPUS:84902613119

SN - 9781855739314

SP - 155

EP - 183

BT - Nanolithography and Patterning Techniques in Microelectronics

PB - Elsevier Ltd

ER -

Patterning of polymer thin films

All Science Journal Classification (ASJC) codes

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