Passivation effect of (NH4)2Sx treatment on GaAs surface before photo-resist and O2 processes

Kyung Soo Suh, Jong Lam Lee, Hyung Ho Park, Chan Ho Kim, Jae Jin Lee, Kee Soo Nam

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5 Citations (Scopus)


Surface properties of GaAs passivated with (NH4)2Sx solution have been analyzed in GaAs wafer and photoresist-treated GaAs using X-ray photoelectron spectroscopy. Sulfur treatment on GaAs surface results in the formation of S-Ga and S-As bonds, which remain after successive rinsing for 1 min in DI water. After oxygen plasma treatment with the HCl-treated sample, the GaAs surface is converted to an As-rich surface, namely, arsenic composition is higher than gallium composition. Meanwhile, the compositions of gallium and arsenic keep almost constant, even after oxygen plasma treatment of the sulfidation-treated sample. This indicates that As-S and Ga-S bonds are revealed to resist the oxidation of the surface. Through in-situ annealing under UHV condition, it is found that the Ga-O bond is thermally stable, but the As-S bond unstable.

Original languageEnglish
Pages (from-to)172-176
Number of pages5
JournalMaterials Science and Engineering B
Issue number1-3
Publication statusPublished - 1996 Feb

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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