Optomechanical pressure sensor using multimode interference couplers with polymer waveguides on a thin p+-Si membrane

Dooyoung Hah; Euisik Yoon; Songcheol Hong

doi:10.1016/S0924-4247(99)00284-8

Optomechanical pressure sensor using multimode interference couplers with polymer waveguides on a thin p⁺-Si membrane

Dooyoung Hah, Euisik Yoon, Songcheol Hong

Yonsei Advanced Science Institute

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

We report a new optomechanical pressure sensor using multimode interference (MMI) couplers with polymer waveguides and a thin p⁺-Si membrane. We have simulated device characteristics by the normal mode theory and the mode propagation method applied to deflection and strain of the membrane. The optical waveguide is made of a single-mode, rib type of NOA73/PMMA/SiO₂ multi-layer system. The devices have been fabricated on the thin p⁺-Si membranes which are selectively etched using bulk micromachining. Device size is 0.4 mm (width)×13 mm (length) and the total thickness of the membrane is 7 μm. The device characteristics are measured using a He-Ne laser (λ = 632.8 nm) as a light source. High sensitivity of 8.2 ppm/Pa has been obtained in the range of 100 kPa.

Original language	English
Pages (from-to)	204-210
Number of pages	7
Journal	Sensors and Actuators, A: Physical
Volume	79
Issue number	3
DOIs	https://doi.org/10.1016/S0924-4247(99)00284-8
Publication status	Published - 2000 Feb 25

Bibliographical note

Funding Information:
This work is partially supported by the Ministry of Information and Communication and by the Korea Science and Engineering Foundation under the contract OERC-1997G0202. The authors would like to thank Mr. E. Park and J. Park for their help in device fabrication.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

Access to Document

10.1016/S0924-4247(99)00284-8

Cite this

@article{926bd610d8634252adb0d3eb41d6ccbc,

title = "Optomechanical pressure sensor using multimode interference couplers with polymer waveguides on a thin p+-Si membrane",

abstract = "We report a new optomechanical pressure sensor using multimode interference (MMI) couplers with polymer waveguides and a thin p+-Si membrane. We have simulated device characteristics by the normal mode theory and the mode propagation method applied to deflection and strain of the membrane. The optical waveguide is made of a single-mode, rib type of NOA73/PMMA/SiO2 multi-layer system. The devices have been fabricated on the thin p+-Si membranes which are selectively etched using bulk micromachining. Device size is 0.4 mm (width)×13 mm (length) and the total thickness of the membrane is 7 μm. The device characteristics are measured using a He-Ne laser (λ = 632.8 nm) as a light source. High sensitivity of 8.2 ppm/Pa has been obtained in the range of 100 kPa.",

author = "Dooyoung Hah and Euisik Yoon and Songcheol Hong",

note = "Funding Information: This work is partially supported by the Ministry of Information and Communication and by the Korea Science and Engineering Foundation under the contract OERC-1997G0202. The authors would like to thank Mr. E. Park and J. Park for their help in device fabrication. ",

year = "2000",

month = feb,

day = "25",

doi = "10.1016/S0924-4247(99)00284-8",

language = "English",

volume = "79",

pages = "204--210",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

number = "3",

}

TY - JOUR

T1 - Optomechanical pressure sensor using multimode interference couplers with polymer waveguides on a thin p+-Si membrane

AU - Hah, Dooyoung

AU - Yoon, Euisik

AU - Hong, Songcheol

N1 - Funding Information: This work is partially supported by the Ministry of Information and Communication and by the Korea Science and Engineering Foundation under the contract OERC-1997G0202. The authors would like to thank Mr. E. Park and J. Park for their help in device fabrication.

PY - 2000/2/25

Y1 - 2000/2/25

N2 - We report a new optomechanical pressure sensor using multimode interference (MMI) couplers with polymer waveguides and a thin p+-Si membrane. We have simulated device characteristics by the normal mode theory and the mode propagation method applied to deflection and strain of the membrane. The optical waveguide is made of a single-mode, rib type of NOA73/PMMA/SiO2 multi-layer system. The devices have been fabricated on the thin p+-Si membranes which are selectively etched using bulk micromachining. Device size is 0.4 mm (width)×13 mm (length) and the total thickness of the membrane is 7 μm. The device characteristics are measured using a He-Ne laser (λ = 632.8 nm) as a light source. High sensitivity of 8.2 ppm/Pa has been obtained in the range of 100 kPa.

AB - We report a new optomechanical pressure sensor using multimode interference (MMI) couplers with polymer waveguides and a thin p+-Si membrane. We have simulated device characteristics by the normal mode theory and the mode propagation method applied to deflection and strain of the membrane. The optical waveguide is made of a single-mode, rib type of NOA73/PMMA/SiO2 multi-layer system. The devices have been fabricated on the thin p+-Si membranes which are selectively etched using bulk micromachining. Device size is 0.4 mm (width)×13 mm (length) and the total thickness of the membrane is 7 μm. The device characteristics are measured using a He-Ne laser (λ = 632.8 nm) as a light source. High sensitivity of 8.2 ppm/Pa has been obtained in the range of 100 kPa.

UR - http://www.scopus.com/inward/record.url?scp=0033900499&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033900499&partnerID=8YFLogxK

U2 - 10.1016/S0924-4247(99)00284-8

DO - 10.1016/S0924-4247(99)00284-8

M3 - Article

AN - SCOPUS:0033900499

SN - 0924-4247

VL - 79

SP - 204

EP - 210

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 3

ER -