TY - GEN
T1 - Optimal batch sizing for parallel machines in semiconductor wafer fabrication
AU - Jeong, Bongju
AU - Choi, Jaehyung
AU - Sung, Jinmo
PY - 2010
Y1 - 2010
N2 - This paper addresses the problem of determining the batch sizes for parallel machines in semiconductor wafer fabrication which has the characteristics of re-entrant process flows. Due to complexity of re-entrant process flows, semiconductor wafer production system has high variability in arrival patterns and experiences high imbalances among processes, which eventually degrades whole system performances. In this paper, we show that finding optimal batch sizes for key processes can considerably reduce the imbalances among processes and queue lengths between processes. A simple technique for determining the optimal batch sizes for parallel machines with different speeds and variability is developed and applied to solve a case problem. The results are briefly discussed in terms of system parameters involved in manufacturing environment.
AB - This paper addresses the problem of determining the batch sizes for parallel machines in semiconductor wafer fabrication which has the characteristics of re-entrant process flows. Due to complexity of re-entrant process flows, semiconductor wafer production system has high variability in arrival patterns and experiences high imbalances among processes, which eventually degrades whole system performances. In this paper, we show that finding optimal batch sizes for key processes can considerably reduce the imbalances among processes and queue lengths between processes. A simple technique for determining the optimal batch sizes for parallel machines with different speeds and variability is developed and applied to solve a case problem. The results are briefly discussed in terms of system parameters involved in manufacturing environment.
KW - Optimal batch size
KW - Re-entrant process
KW - Semiconductor wafer fabrication
UR - http://www.scopus.com/inward/record.url?scp=78651438010&partnerID=8YFLogxK
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U2 - 10.1109/ICCIE.2010.5668414
DO - 10.1109/ICCIE.2010.5668414
M3 - Conference contribution
AN - SCOPUS:78651438010
SN - 9781424472956
T3 - 40th International Conference on Computers and Industrial Engineering: Soft Computing Techniques for Advanced Manufacturing and Service Systems, CIE40 2010
BT - 40th International Conference on Computers and Industrial Engineering
T2 - 40th International Conference on Computers and Industrial Engineering, CIE40 2010
Y2 - 25 July 2010 through 28 July 2010
ER -