Abstract
Here, we present a triple illumination phase interferometer to have a more flexible unwrapping measurement range for single shot optical unwrapping. Three beams of this interferometer illuminate a sample at different incident angles, three phases of the different incident angles are simultaneously recorded using three spatial frequencies. The different direction phases can be used for dual illumination optical unwrapping; as a result, the phase can be unwrapped by more than one measurement range. The feasibility of this technique is demonstrated by measuring a stepped object with heights of 150 and 660 μm. The smaller stepped phase is unwrapped by two measurement range; however, the phase of larger step is wrapped for only one of the measurement range.
Original language | English |
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Title of host publication | Photonic Instrumentation Engineering II |
Editors | Yakov G. Soskind, Craig Olson |
Publisher | SPIE |
ISBN (Electronic) | 9781628414592 |
DOIs | |
Publication status | Published - 2015 |
Event | Photonic Instrumentation Engineering II - San Francisco, United States Duration: 2015 Feb 11 → 2015 Feb 12 |
Publication series
Name | Proceedings of SPIE - The International Society for Optical Engineering |
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Volume | 9369 |
ISSN (Print) | 0277-786X |
ISSN (Electronic) | 1996-756X |
Other
Other | Photonic Instrumentation Engineering II |
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Country/Territory | United States |
City | San Francisco |
Period | 15/2/11 → 15/2/12 |
Bibliographical note
Publisher Copyright:© 2015 SPIE.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering