Optical properties and microstructure of CeO2-SiO2 composite thin films

Won Hoe Koo; Soon Moon Jeoung; Sang Hun Choi; Sung Jin Jo; Hong Koo Baik; Se Jong Lee; Kie Moon Song

doi:10.1016/j.tsf.2004.03.042

Optical properties and microstructure of CeO₂-SiO₂ composite thin films

Won Hoe Koo, Soon Moon Jeoung, Sang Hun Choi, Sung Jin Jo, Hong Koo Baik, Se Jong Lee, Kie Moon Song

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

CeO₂-SiO₂ composite thin films were prepared by e-beam evaporation and ion beam-assisted deposition (IBAD) using an End-Hall ion source. The refractive index of composite thin films exhibited a maximum value at 20-35% SiO₂ fraction, indicating the highest packing density. Optical analysis revealed that the transmittance and reflectance spectra of composite films were consistent with the results of the refractive index. The results from X-ray diffractometry (XRD), atomic force microscopy (AFM) and scanning electron microscopy (SEM) measurements showed that composite thin films containing 20-35% SiO₂ concentration had a dense and smooth amorphous surface, compared to the roughened granular structure of the pure SiO₂ and CeO₂ thin films.

Original language	English
Pages (from-to)	28-31
Number of pages	4
Journal	Thin Solid Films
Volume	468
Issue number	1-2
DOIs	https://doi.org/10.1016/j.tsf.2004.03.042
Publication status	Published - 2004 Dec 1

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2004.03.042

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title = "Optical properties and microstructure of CeO2-SiO2 composite thin films",

abstract = "CeO2-SiO2 composite thin films were prepared by e-beam evaporation and ion beam-assisted deposition (IBAD) using an End-Hall ion source. The refractive index of composite thin films exhibited a maximum value at 20-35% SiO2 fraction, indicating the highest packing density. Optical analysis revealed that the transmittance and reflectance spectra of composite films were consistent with the results of the refractive index. The results from X-ray diffractometry (XRD), atomic force microscopy (AFM) and scanning electron microscopy (SEM) measurements showed that composite thin films containing 20-35% SiO2 concentration had a dense and smooth amorphous surface, compared to the roughened granular structure of the pure SiO2 and CeO2 thin films.",

author = "Koo, {Won Hoe} and Jeoung, {Soon Moon} and Choi, {Sang Hun} and Jo, {Sung Jin} and Baik, {Hong Koo} and Lee, {Se Jong} and Song, {Kie Moon}",

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T1 - Optical properties and microstructure of CeO2-SiO2 composite thin films

AU - Koo, Won Hoe

AU - Jeoung, Soon Moon

AU - Choi, Sang Hun

AU - Jo, Sung Jin

AU - Baik, Hong Koo

AU - Lee, Se Jong

AU - Song, Kie Moon

PY - 2004/12/1

Y1 - 2004/12/1

N2 - CeO2-SiO2 composite thin films were prepared by e-beam evaporation and ion beam-assisted deposition (IBAD) using an End-Hall ion source. The refractive index of composite thin films exhibited a maximum value at 20-35% SiO2 fraction, indicating the highest packing density. Optical analysis revealed that the transmittance and reflectance spectra of composite films were consistent with the results of the refractive index. The results from X-ray diffractometry (XRD), atomic force microscopy (AFM) and scanning electron microscopy (SEM) measurements showed that composite thin films containing 20-35% SiO2 concentration had a dense and smooth amorphous surface, compared to the roughened granular structure of the pure SiO2 and CeO2 thin films.

AB - CeO2-SiO2 composite thin films were prepared by e-beam evaporation and ion beam-assisted deposition (IBAD) using an End-Hall ion source. The refractive index of composite thin films exhibited a maximum value at 20-35% SiO2 fraction, indicating the highest packing density. Optical analysis revealed that the transmittance and reflectance spectra of composite films were consistent with the results of the refractive index. The results from X-ray diffractometry (XRD), atomic force microscopy (AFM) and scanning electron microscopy (SEM) measurements showed that composite thin films containing 20-35% SiO2 concentration had a dense and smooth amorphous surface, compared to the roughened granular structure of the pure SiO2 and CeO2 thin films.

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Optical properties and microstructure of CeO₂-SiO₂ composite thin films

Abstract

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