Abstract
Mixed acid, which consist of HF and HNO3, is used as a good etchant for silicon dioxide in the wet etching and pickling process of stainless steel. The optical detection of concentration for such mixed acids is crucial to optimize and cut costs in the manufacturing process. Optical detection in the IR regime has been utilized to measure the concentration of the mixed acid for HF and HNO3, because that has several strong sorption peaks, which is contributed by vibrational mode of each acid molecular in this spectrum. In this research, we observed the concentrations of mixed acid to consist of HF and HNO3, as we measured the absorption intensity of OH- stretch and NO3- stretch band by optical spectroscopy. The concentration range of HF over 1.5-3 wt% and that of HNO3 over 2-10 wt% were studied in room temperature.
Original language | English |
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Article number | 71832A |
Journal | Progress in Biomedical Optics and Imaging - Proceedings of SPIE |
Volume | 7183 |
DOIs | |
Publication status | Published - 2009 |
Event | Multiphoton Microscopy in the Biomedical Sciences IX - San Jose, CA, United States Duration: 2009 Jan 25 → 2009 Jan 27 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Biomaterials
- Atomic and Molecular Physics, and Optics
- Radiology Nuclear Medicine and imaging