The air flow field around a conical type solid immersion lens (SIL) system is simulated numerically and confirmed with experiment using a micro-particle image velocimetry (PIV) system. Jt is found that the back-flow from the downstream of the SIL is a major candidate for the contamination of the SIL. Five modifications are proposed to suppress the particle conveying mechanism, the back-flow. Among these modifications a method using two flow-bypasses reduces the back-flow most effectively, which connects the top surface of the SIL system and two side-holes of the lens holder where the static pressure is the minimum.
|Number of pages||6|
|Journal||Japanese journal of applied physics|
|Issue number||7 PART 2|
|Publication status||Published - 2008 Jul 18|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)