@inproceedings{c9039b6372954455bdd435cdd4e24070,
title = "Novel fabrication of electroplated 3D micro-coils using 3d photolithography of thick photoresist",
author = "Yoon, {J. B.} and Han, {C. H.} and Yoon, {E. S.} and Kim, {C. K.}",
year = "1998",
doi = "10.1109/IMNC.1998.729981",
language = "English",
series = "Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "85--86",
editor = "Yoo, {Hyung Joon} and Shinji Okazaki and Jinho Ahn and Ohyun Kim and Masanori Komuro",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 1998",
address = "United States",
note = "1998 International Microprocesses and Nanotechnology Conference, MNC 1998 ; Conference date: 13-07-1998 Through 16-07-1998",
}