To achieve high performance of nanoelectromechanical resonators in room-temperature and low-vacuum conditions, the precise control of electrothermal power is critical in not only frequency tuning but also regulating nonlinearity in the radio-frequency range. This study presents theoretical analysis and experimental results for controlling nonlinearity of nanoelectromechanical resonators using nonlinear damping and stiffness terms. Experiments show that, with increasing electrothermal power, critical amplitude increases up to where the resonators display linear harmonic oscillation. As a result, the linearity of the resonator that has been driven into the nonlinear regime can be reclaimed.
Bibliographical noteFunding Information:
Manuscript received May 23, 2012; accepted July 14, 2012. Date of publication August 27, 2012; date of current version September 21, 2012. This work was supported in part by Samsung Electronics under Grant 2011-8-2419, by the Priority Research Centers Program under Grant 2011-8-1959, and by the Basic Science Research Program under Grant 2012-8-0622 through the National Research Foundation of Korea funded by the Ministry of Education, Science and Technology of the Korean Government. The review of this letter was arranged by Editor S. J. Koester.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering