Nonlinear diffusion process modeling using response surface methodology and variable transformation

The nonlinear process modeling is investigated using statistical design method and response surface methodology. Three input factors are examined with respect to the response factor. In order to minimize the joint confidence region of fabrication process with varying conditions, D-optimal experimental design technique is performed and diffusion rate is characterized by response model. Then, the statistical results are used to verify the fitness of the nonlinear process model. Based on the results, this modeling methodology can be optimized process condition for semiconductor manufacturing.