Noise and sensitivity characteristics of solid-state nanopores with a boron nitride 2-D membrane on a pyrex substrate

Kyeong Beom Park, Hyung Jun Kim, Hyun Mi Kim, Sang A. Han, Kang Hyuck Lee, Sang Woo Kim, Ki Bum Kim

Research output: Contribution to journalArticlepeer-review

37 Citations (Scopus)

Abstract

We have fabricated highly sensitive and low noise solid-state nanopores with multiple layers of boron nitride (BN) membranes transferred onto a pyrex substrate. Both the dielectric and flicker noise of the device, which have been described as one of the bottlenecks to making highly sensitive 2-D membrane nanopore devices, have been reduced as follows. Firstly, a pyrex substrate with a low dielectric constant (εr = 4.7-5.1) and low dielectric loss (D < 0.001) is used instead of a Si substrate to reduce the dielectric noise of the device. Secondly, flicker noise is minimized by employing a 100 nm thick SiNx supporting layer with a small opening (less than 100 nm) for BN membrane transfer to enhance the mechanical stability. The flicker noise is further reduced by transferring multiple layers of BN instead of a single layer of BN. The resulting multi-layered BN device shows significant reduction of dielectric and 1/f noise as compared to the devices with a single layer of the BN and Si substrate. Furthermore, we demonstrate dsDNA translocations with a high signal to noise ratio around 50 at 100 and 10 kHz bandwidths.

Original languageEnglish
Pages (from-to)5755-5763
Number of pages9
JournalNanoscale
Volume8
Issue number10
DOIs
Publication statusPublished - 2016 Mar 14

Bibliographical note

Publisher Copyright:
© 2016 The Royal Society of Chemistry.

All Science Journal Classification (ASJC) codes

  • General Materials Science

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