Abstract
In this paper, a new modeling methodology for thin film bulk acoustic resonator (TFBAR) is presented and the formulations of each lumped element in the model are also presented. The proposed model has three optimization variables which is half of the Modified Butterworth-Van Dyke (MBVB) model, and as a result the curve fitting for the measured data is much faster and more accurate than any other conventional models. In addition, two types of TFBAR ladder filters are designed and fabricated to analyze the effects of on-wafer inductor integration. Fabricated on-water spiral inductor reveals the Q factor of 9 at 2 GHz and the inductor integrated filters have approximately 10 to 12 dB out-of-band rejection improvement compared to the original filters.
| Original language | English |
|---|---|
| Pages (from-to) | 379-382 |
| Number of pages | 4 |
| Journal | IEEE MTT-S International Microwave Symposium Digest |
| Volume | 1 |
| Publication status | Published - 2004 |
| Event | 2004 IEEE MITT-S International Microwave Symposium Digest - Fort Worth, TX, United States Duration: 2004 Jun 6 → 2004 Jun 11 |
All Science Journal Classification (ASJC) codes
- Radiation
- Condensed Matter Physics
- Electrical and Electronic Engineering