Nano/micro double texturing of antireflective subwavelength structures on inverted pyramids

Yunwon Song, Kyunghwan Kim, Keorock Choi, Bugeun Ki, Jungwoo Oh

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)


Antireflective Si subwavelength structures (SWSs) are fabricated after the texturing of nano-scale holes directly onto micro-scale inverted pyramid arrays. Thermally agglomerated Au catalysts and Au-assisted chemical etching adjusted the featured nanohole sizes that determined surface reflection. When nano-scale SWSs were textured into micro-scale inverted pyramids, the total reflectance was dramatically decreased to 2.9% in a wavelength region of 200-1100 nm. Additionally, the average specular reflectance value was below 3.6% up to the incident angle of 60°. The surface reflection was efficiently suppressed by combining the light trap of microstructures and anti-reflectance of nanostructures. This technique demonstrated the feasibility of nano/micro double textured structures for application in high-performance optical devices.

Original languageEnglish
Pages (from-to)291-296
Number of pages6
JournalSolar Energy
Publication statusPublished - 2016 Oct 1

Bibliographical note

Publisher Copyright:
© 2016 Elsevier Ltd.

All Science Journal Classification (ASJC) codes

  • Renewable Energy, Sustainability and the Environment
  • General Materials Science


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