Nanomaterials fabrication using advanced thin film deposition and nanohybrid process

Hyungjun Kim; Han Bo Ram Lee; Woo Hee Kim; Sang Joon Park; In Chan Hwang

doi:10.1109/NMDC.2009.5167578

Nanomaterials fabrication using advanced thin film deposition and nanohybrid process

Hyungjun Kim, Han Bo Ram Lee, Woo Hee Kim, Sang Joon Park, In Chan Hwang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

With device scaling, the introduction of emerging materials including nanowires and nanodots is required more than ever. We present several examples of making nanomaterials based on advanced thin film deposition techniques including atomic layer deposition, supercritical fluid deposition (SCFD), and selective epitaxial growth (SEG), and nanohybrid process utilizing self-assembled nanotemplate. Metallic nanomaterials were synthesized by highly conformal ALD Ru and anodic aluminum oxide (AAO) nanotemplate as well as by spontaneous formation during plasma enhanced ALD Co. Also, using SCFD with high gap fill properties, Ru nanoparticles and RuO₂ nanorod were fabricated. Finally, using self-assembled diblock copolymer as a template, ordered array of SiGe nanodots were fabricated by employing SEG.

Original language	English
Title of host publication	2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009
Pages	3-4
Number of pages	2
DOIs	https://doi.org/10.1109/NMDC.2009.5167578
Publication status	Published - 2009
Event	2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009 - Traverse City, MI, United States Duration: 2009 Jun 2 → 2009 Jun 5

Publication series

Name	2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009

Other

Other	2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009
Country/Territory	United States
City	Traverse City, MI
Period	09/6/2 → 09/6/5

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

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10.1109/NMDC.2009.5167578

Cite this

Kim, H., Lee, H. B. R., Kim, W. H., Park, S. J., & Hwang, I. C. (2009). Nanomaterials fabrication using advanced thin film deposition and nanohybrid process. In 2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009 (pp. 3-4). Article 5167578 (2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009). https://doi.org/10.1109/NMDC.2009.5167578

@inproceedings{800a4ae8aecb44b4a9cd676e0e7267fd,

title = "Nanomaterials fabrication using advanced thin film deposition and nanohybrid process",

abstract = "With device scaling, the introduction of emerging materials including nanowires and nanodots is required more than ever. We present several examples of making nanomaterials based on advanced thin film deposition techniques including atomic layer deposition, supercritical fluid deposition (SCFD), and selective epitaxial growth (SEG), and nanohybrid process utilizing self-assembled nanotemplate. Metallic nanomaterials were synthesized by highly conformal ALD Ru and anodic aluminum oxide (AAO) nanotemplate as well as by spontaneous formation during plasma enhanced ALD Co. Also, using SCFD with high gap fill properties, Ru nanoparticles and RuO2 nanorod were fabricated. Finally, using self-assembled diblock copolymer as a template, ordered array of SiGe nanodots were fabricated by employing SEG.",

keywords = "ALD, Nanotemplate, SCFD, SEG",

author = "Hyungjun Kim and Lee, {Han Bo Ram} and Kim, {Woo Hee} and Park, {Sang Joon} and Hwang, {In Chan}",

year = "2009",

doi = "10.1109/NMDC.2009.5167578",

language = "English",

isbn = "9781424446964",

series = "2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009",

pages = "3--4",

booktitle = "2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009",

note = "2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009 ; Conference date: 02-06-2009 Through 05-06-2009",

}

Kim, H, Lee, HBR, Kim, WH, Park, SJ & Hwang, IC 2009, Nanomaterials fabrication using advanced thin film deposition and nanohybrid process. in 2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009., 5167578, 2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009, pp. 3-4, 2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009, Traverse City, MI, United States, 09/6/2. https://doi.org/10.1109/NMDC.2009.5167578

Nanomaterials fabrication using advanced thin film deposition and nanohybrid process. / Kim, Hyungjun; Lee, Han Bo Ram; Kim, Woo Hee et al.
2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009. 2009. p. 3-4 5167578 (2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Nanomaterials fabrication using advanced thin film deposition and nanohybrid process

AU - Kim, Hyungjun

AU - Lee, Han Bo Ram

AU - Kim, Woo Hee

AU - Park, Sang Joon

AU - Hwang, In Chan

PY - 2009

Y1 - 2009

N2 - With device scaling, the introduction of emerging materials including nanowires and nanodots is required more than ever. We present several examples of making nanomaterials based on advanced thin film deposition techniques including atomic layer deposition, supercritical fluid deposition (SCFD), and selective epitaxial growth (SEG), and nanohybrid process utilizing self-assembled nanotemplate. Metallic nanomaterials were synthesized by highly conformal ALD Ru and anodic aluminum oxide (AAO) nanotemplate as well as by spontaneous formation during plasma enhanced ALD Co. Also, using SCFD with high gap fill properties, Ru nanoparticles and RuO2 nanorod were fabricated. Finally, using self-assembled diblock copolymer as a template, ordered array of SiGe nanodots were fabricated by employing SEG.

AB - With device scaling, the introduction of emerging materials including nanowires and nanodots is required more than ever. We present several examples of making nanomaterials based on advanced thin film deposition techniques including atomic layer deposition, supercritical fluid deposition (SCFD), and selective epitaxial growth (SEG), and nanohybrid process utilizing self-assembled nanotemplate. Metallic nanomaterials were synthesized by highly conformal ALD Ru and anodic aluminum oxide (AAO) nanotemplate as well as by spontaneous formation during plasma enhanced ALD Co. Also, using SCFD with high gap fill properties, Ru nanoparticles and RuO2 nanorod were fabricated. Finally, using self-assembled diblock copolymer as a template, ordered array of SiGe nanodots were fabricated by employing SEG.

KW - ALD

KW - Nanotemplate

KW - SCFD

KW - SEG

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BT - 2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009

T2 - 2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009

Y2 - 2 June 2009 through 5 June 2009

ER -

Nanomaterials fabrication using advanced thin film deposition and nanohybrid process

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