Nanoindentation of silicon surfaces: Molecular-dynamics simulations of atomic force microscopy

R. Astala, M. Kaukonen, R. Nieminen, T. Heine

Research output: Contribution to journalArticlepeer-review

36 Citations (Scopus)


We investigate the atomic-scale details of atomic force microscopy through a quasistatic molecular dynamics simulation together with a density-functional-based tight-binding method. The changes in the AFM tip shape, the size of the tip-sample contact area, as well as the microscopic hardness and Young’s moduli of silicon (Formula presented) surfaces are studied. Furthermore, the effects of hydrogen termination of the surface and of subsurface vacancies on hardness and Young’s modulus are discussed.

Original languageEnglish
Pages (from-to)2973-2980
Number of pages8
JournalPhysical Review B - Condensed Matter and Materials Physics
Issue number4
Publication statusPublished - 2000

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics


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