Nanogap-controlled Pd coating for hydrogen sensitive switches and hydrogen sensors

Young Seok Shim; Byungjin Jang; Jun Min Suh; Myoung Sub Noh; Sangtae Kim; Soo Deok Han; Young Geun Song; Do Hong Kim; Chong Yun Kang; Ho Won Jang; Wooyoung Lee

doi:10.1016/j.snb.2017.08.198

Nanogap-controlled Pd coating for hydrogen sensitive switches and hydrogen sensors

Young Seok Shim, Byungjin Jang, Jun Min Suh, Myoung Sub Noh, Sangtae Kim, Soo Deok Han, Young Geun Song, Do Hong Kim, Chong Yun Kang, Ho Won Jang, Wooyoung Lee

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

38 Citations (Scopus)

Abstract

We present a simple and facile method for producing high-performance hydrogen (H₂) sensors based on vertically ordered metal-oxide nanorods with a Pd films on a 4-inch SiO₂/Si substrate by a glancing-angle deposition. Firstly, optimal density of nanorods was formed by changing an incident angle of vapor flux. Secondly, nanogaps between each nanorod were precisely controlled by manipulating thickness of Pd films. At room temperature in ambient air, 15-nm-thick Pd-coated SiO₂ nanorods showed the rapid on-off switches. The average response time was approximately 2.8 s (the longest response time: 5 s), and the recovery time was less than 1 s for 2%–0.8% H₂. For 20-nm-thick Pd-coated SiO₂ nanorods, detection of limit was reduced to 10 ppm due to semi-on-off operation. The reproducibility of our approaches was investigated by fabricating the Pd-coated SnO₂ nanorods. They also exhibited the high H₂ sensing performance as Pd-coated SiO₂ nanorods. We strongly believe that high H₂ sensing performance of Pd nanogap controlled metal oxide nanorods provides a new perspective for room-temperature H₂ switches and sensors based on H₂-induced lattice expansion.

Original language	English
Pages (from-to)	1841-1848
Number of pages	8
Journal	Sensors and Actuators, B: Chemical
Volume	255
DOIs	https://doi.org/10.1016/j.snb.2017.08.198
Publication status	Published - 2018 Feb

Bibliographical note

Publisher Copyright:
© 2017 Elsevier B.V.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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10.1016/j.snb.2017.08.198

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@article{83523f8a0a72454ca802a8d4acbb9c92,

title = "Nanogap-controlled Pd coating for hydrogen sensitive switches and hydrogen sensors",

abstract = "We present a simple and facile method for producing high-performance hydrogen (H2) sensors based on vertically ordered metal-oxide nanorods with a Pd films on a 4-inch SiO2/Si substrate by a glancing-angle deposition. Firstly, optimal density of nanorods was formed by changing an incident angle of vapor flux. Secondly, nanogaps between each nanorod were precisely controlled by manipulating thickness of Pd films. At room temperature in ambient air, 15-nm-thick Pd-coated SiO2 nanorods showed the rapid on-off switches. The average response time was approximately 2.8 s (the longest response time: 5 s), and the recovery time was less than 1 s for 2%–0.8% H2. For 20-nm-thick Pd-coated SiO2 nanorods, detection of limit was reduced to 10 ppm due to semi-on-off operation. The reproducibility of our approaches was investigated by fabricating the Pd-coated SnO2 nanorods. They also exhibited the high H2 sensing performance as Pd-coated SiO2 nanorods. We strongly believe that high H2 sensing performance of Pd nanogap controlled metal oxide nanorods provides a new perspective for room-temperature H2 switches and sensors based on H2-induced lattice expansion.",

author = "Shim, {Young Seok} and Byungjin Jang and Suh, {Jun Min} and Noh, {Myoung Sub} and Sangtae Kim and Han, {Soo Deok} and Song, {Young Geun} and Kim, {Do Hong} and Kang, {Chong Yun} and Jang, {Ho Won} and Wooyoung Lee",

note = "Publisher Copyright: {\textcopyright} 2017 Elsevier B.V.",

year = "2018",

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doi = "10.1016/j.snb.2017.08.198",

language = "English",

volume = "255",

pages = "1841--1848",

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T1 - Nanogap-controlled Pd coating for hydrogen sensitive switches and hydrogen sensors

AU - Shim, Young Seok

AU - Jang, Byungjin

AU - Suh, Jun Min

AU - Noh, Myoung Sub

AU - Kim, Sangtae

AU - Han, Soo Deok

AU - Song, Young Geun

AU - Kim, Do Hong

AU - Kang, Chong Yun

AU - Jang, Ho Won

AU - Lee, Wooyoung

PY - 2018/2

Y1 - 2018/2

N2 - We present a simple and facile method for producing high-performance hydrogen (H2) sensors based on vertically ordered metal-oxide nanorods with a Pd films on a 4-inch SiO2/Si substrate by a glancing-angle deposition. Firstly, optimal density of nanorods was formed by changing an incident angle of vapor flux. Secondly, nanogaps between each nanorod were precisely controlled by manipulating thickness of Pd films. At room temperature in ambient air, 15-nm-thick Pd-coated SiO2 nanorods showed the rapid on-off switches. The average response time was approximately 2.8 s (the longest response time: 5 s), and the recovery time was less than 1 s for 2%–0.8% H2. For 20-nm-thick Pd-coated SiO2 nanorods, detection of limit was reduced to 10 ppm due to semi-on-off operation. The reproducibility of our approaches was investigated by fabricating the Pd-coated SnO2 nanorods. They also exhibited the high H2 sensing performance as Pd-coated SiO2 nanorods. We strongly believe that high H2 sensing performance of Pd nanogap controlled metal oxide nanorods provides a new perspective for room-temperature H2 switches and sensors based on H2-induced lattice expansion.

AB - We present a simple and facile method for producing high-performance hydrogen (H2) sensors based on vertically ordered metal-oxide nanorods with a Pd films on a 4-inch SiO2/Si substrate by a glancing-angle deposition. Firstly, optimal density of nanorods was formed by changing an incident angle of vapor flux. Secondly, nanogaps between each nanorod were precisely controlled by manipulating thickness of Pd films. At room temperature in ambient air, 15-nm-thick Pd-coated SiO2 nanorods showed the rapid on-off switches. The average response time was approximately 2.8 s (the longest response time: 5 s), and the recovery time was less than 1 s for 2%–0.8% H2. For 20-nm-thick Pd-coated SiO2 nanorods, detection of limit was reduced to 10 ppm due to semi-on-off operation. The reproducibility of our approaches was investigated by fabricating the Pd-coated SnO2 nanorods. They also exhibited the high H2 sensing performance as Pd-coated SiO2 nanorods. We strongly believe that high H2 sensing performance of Pd nanogap controlled metal oxide nanorods provides a new perspective for room-temperature H2 switches and sensors based on H2-induced lattice expansion.

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ER -

Nanogap-controlled Pd coating for hydrogen sensitive switches and hydrogen sensors

Abstract

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