Nanogap-controlled Pd coating for hydrogen sensitive switches and hydrogen sensors

Young Seok Shim, Byungjin Jang, Jun Min Suh, Myoung Sub Noh, Sangtae Kim, Soo Deok Han, Young Geun Song, Do Hong Kim, Chong Yun Kang, Ho Won Jang, Wooyoung Lee

Research output: Contribution to journalArticlepeer-review

38 Citations (Scopus)


We present a simple and facile method for producing high-performance hydrogen (H2) sensors based on vertically ordered metal-oxide nanorods with a Pd films on a 4-inch SiO2/Si substrate by a glancing-angle deposition. Firstly, optimal density of nanorods was formed by changing an incident angle of vapor flux. Secondly, nanogaps between each nanorod were precisely controlled by manipulating thickness of Pd films. At room temperature in ambient air, 15-nm-thick Pd-coated SiO2 nanorods showed the rapid on-off switches. The average response time was approximately 2.8 s (the longest response time: 5 s), and the recovery time was less than 1 s for 2%–0.8% H2. For 20-nm-thick Pd-coated SiO2 nanorods, detection of limit was reduced to 10 ppm due to semi-on-off operation. The reproducibility of our approaches was investigated by fabricating the Pd-coated SnO2 nanorods. They also exhibited the high H2 sensing performance as Pd-coated SiO2 nanorods. We strongly believe that high H2 sensing performance of Pd nanogap controlled metal oxide nanorods provides a new perspective for room-temperature H2 switches and sensors based on H2-induced lattice expansion.

Original languageEnglish
Pages (from-to)1841-1848
Number of pages8
JournalSensors and Actuators, B: Chemical
Publication statusPublished - 2018 Feb

Bibliographical note

Publisher Copyright:
© 2017 Elsevier B.V.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry


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