Nano-tribological characteristics of PZT thin film investigated by atomic force microscopy

Koo Hyun Chung, Yong Ha Lee, Young Tae Kim, Dae Eun Kim, Jingyoo Yoo, Seungbum Hong

Research output: Contribution to journalArticlepeer-review

22 Citations (Scopus)


In this work, the nano-scale tribological characteristics of PZT thin films (Pb(ZrxTi1 - x)O3: PZT) with various Zr/Ti ratios were investigated using an Atomic Force Microscope (AFM). The PZT thin films deposited by the sol-gel method were characterized by using an AFM, X-Ray Diffraction (XRD), and a nano-indentation technique. From the experimental results, the friction coefficient of the PZT thin film was found to be about 0.1-0.2 under a 0.1-10 μN normal force. It was determined that the wear rate of the PZT thin film was in the order of 10- 8 mm3/N·cycle. Also, it was observed that the crystalline structure of the PZT was amorphized due to mechanical stress.

Original languageEnglish
Pages (from-to)7983-7991
Number of pages9
JournalSurface and Coatings Technology
Issue number18
Publication statusPublished - 2007 Jun 25

Bibliographical note

Funding Information:
This work was supported by Samsung Advanced Institute of Technology (SAIT) and the Korea Ministry of Science and Technology through the National R&D Project for Nano Science and Technology (M1-0203-00-0031-06M0300-03110).

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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