Nano-tribological characteristics of PZT thin film investigated by atomic force microscopy

Koo Hyun Chung; Yong Ha Lee; Young Tae Kim; Dae Eun Kim; Jingyoo Yoo; Seungbum Hong

doi:10.1016/j.surfcoat.2007.03.044

Nano-tribological characteristics of PZT thin film investigated by atomic force microscopy

Koo Hyun Chung, Yong Ha Lee, Young Tae Kim, Dae Eun Kim, Jingyoo Yoo, Seungbum Hong

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

22 Citations (Scopus)

Abstract

In this work, the nano-scale tribological characteristics of PZT thin films (Pb(Zr_xTi_{1 - x})O₃: PZT) with various Zr/Ti ratios were investigated using an Atomic Force Microscope (AFM). The PZT thin films deposited by the sol-gel method were characterized by using an AFM, X-Ray Diffraction (XRD), and a nano-indentation technique. From the experimental results, the friction coefficient of the PZT thin film was found to be about 0.1-0.2 under a 0.1-10 μN normal force. It was determined that the wear rate of the PZT thin film was in the order of 10^{- 8} mm³/N·cycle. Also, it was observed that the crystalline structure of the PZT was amorphized due to mechanical stress.

Original language	English
Pages (from-to)	7983-7991
Number of pages	9
Journal	Surface and Coatings Technology
Volume	201
Issue number	18
DOIs	https://doi.org/10.1016/j.surfcoat.2007.03.044
Publication status	Published - 2007 Jun 25

Bibliographical note

Funding Information:
This work was supported by Samsung Advanced Institute of Technology (SAIT) and the Korea Ministry of Science and Technology through the National R&D Project for Nano Science and Technology (M1-0203-00-0031-06M0300-03110).

All Science Journal Classification (ASJC) codes

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/j.surfcoat.2007.03.044

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title = "Nano-tribological characteristics of PZT thin film investigated by atomic force microscopy",

abstract = "In this work, the nano-scale tribological characteristics of PZT thin films (Pb(ZrxTi1 - x)O3: PZT) with various Zr/Ti ratios were investigated using an Atomic Force Microscope (AFM). The PZT thin films deposited by the sol-gel method were characterized by using an AFM, X-Ray Diffraction (XRD), and a nano-indentation technique. From the experimental results, the friction coefficient of the PZT thin film was found to be about 0.1-0.2 under a 0.1-10 μN normal force. It was determined that the wear rate of the PZT thin film was in the order of 10- 8 mm3/N·cycle. Also, it was observed that the crystalline structure of the PZT was amorphized due to mechanical stress.",

author = "Chung, {Koo Hyun} and Lee, {Yong Ha} and Kim, {Young Tae} and Kim, {Dae Eun} and Jingyoo Yoo and Seungbum Hong",

note = "Funding Information: This work was supported by Samsung Advanced Institute of Technology (SAIT) and the Korea Ministry of Science and Technology through the National R&D Project for Nano Science and Technology (M1-0203-00-0031-06M0300-03110).",

year = "2007",

month = jun,

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doi = "10.1016/j.surfcoat.2007.03.044",

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T1 - Nano-tribological characteristics of PZT thin film investigated by atomic force microscopy

AU - Chung, Koo Hyun

AU - Lee, Yong Ha

AU - Kim, Young Tae

AU - Kim, Dae Eun

AU - Yoo, Jingyoo

AU - Hong, Seungbum

N1 - Funding Information: This work was supported by Samsung Advanced Institute of Technology (SAIT) and the Korea Ministry of Science and Technology through the National R&D Project for Nano Science and Technology (M1-0203-00-0031-06M0300-03110).

PY - 2007/6/25

Y1 - 2007/6/25

N2 - In this work, the nano-scale tribological characteristics of PZT thin films (Pb(ZrxTi1 - x)O3: PZT) with various Zr/Ti ratios were investigated using an Atomic Force Microscope (AFM). The PZT thin films deposited by the sol-gel method were characterized by using an AFM, X-Ray Diffraction (XRD), and a nano-indentation technique. From the experimental results, the friction coefficient of the PZT thin film was found to be about 0.1-0.2 under a 0.1-10 μN normal force. It was determined that the wear rate of the PZT thin film was in the order of 10- 8 mm3/N·cycle. Also, it was observed that the crystalline structure of the PZT was amorphized due to mechanical stress.

AB - In this work, the nano-scale tribological characteristics of PZT thin films (Pb(ZrxTi1 - x)O3: PZT) with various Zr/Ti ratios were investigated using an Atomic Force Microscope (AFM). The PZT thin films deposited by the sol-gel method were characterized by using an AFM, X-Ray Diffraction (XRD), and a nano-indentation technique. From the experimental results, the friction coefficient of the PZT thin film was found to be about 0.1-0.2 under a 0.1-10 μN normal force. It was determined that the wear rate of the PZT thin film was in the order of 10- 8 mm3/N·cycle. Also, it was observed that the crystalline structure of the PZT was amorphized due to mechanical stress.

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JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

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ER -

Nano-tribological characteristics of PZT thin film investigated by atomic force microscopy

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

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