Monolayer-precision fabrication of mixed-organic-inorganic nanohybrid superlattices for flexible electronic devices

Byoung H. Lee, Kwang H. Lee, Seongil Im, Myung M. Sung

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57 Citations (Scopus)


We report a low-temperature fabrication of mixed-organic-inorganic nanohybrid superlattices for high-k thin stable gate dielectrics on flexible substrates. The self-assembled organic layers (SAOLs) were grown by repeated sequential adsorptions of C{double bond, long}C-terminated alkylsilane and metal (Al or Ti) hydroxyl with ozone activation, which was called "molecular layer deposition (MLD)". The MLD method is a self-controlled layer-by-layer growth process under vacuum conditions, and is perfectly compatible with the atomic layer deposition (ALD) method. The TiO2 and Al2O3 inorganic layers were grown by ALD, which relies on sequential saturated surface reactions resulting in the formation of a monolayer in each sequence and is a potentially powerful method for preparing high quality multicomponent superlattices. The MLD method combined with ALD (MLD-ALD) was applied to fabricate SAOLs-Al2O3-SAOLs-TiO2 nanohybrid superlattices on polycarbonate substrates with accurate control of film thickness, large-scale uniformity, excellent conformality, good reproducibility, multilayer processing capability, sharp interfaces, and excellent film qualities at relatively low temperature. The prepared ultrathin nanohybrid films exhibited good thermal and mechanical stability, good flexibility, excellent insulating properties, and relatively high dielectric constant k (6-11). The MLD-ALD method is an ideal fabrication technique for various flexible electronic devices.

Original languageEnglish
Pages (from-to)1146-1153
Number of pages8
JournalOrganic Electronics
Issue number6
Publication statusPublished - 2008 Dec

Bibliographical note

Funding Information:
This work was supported by the Korea Science and Engineering Foundation (KOSEF) grant funded by the Korea government (MOST) (No. 2008-02378 and No. R01-2007-000-10402-0) and by the SRC/ERC program of MOST/KOSEF (grant R11-2005-048-00000-0).

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Materials Chemistry
  • Chemistry(all)
  • Electrical and Electronic Engineering
  • Biomaterials


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