TY - JOUR
T1 - Modeling and initial growth mode of ultrathin film on the basis of electrical conductivity of substrate
AU - Song, Seok Kyun
AU - Koh, Seok Keun
AU - Lee, Deuk Yeon
AU - Song, Kie Moon
AU - Baik, Hong Koo
PY - 2004/9
Y1 - 2004/9
N2 - A model for the electrical conductance of a semiconductive substrate with an average thickness is proposed for a region of initial growth before the appearance of a tunneling effect. Based on this model, we propose 6 different growth modes according to the film thickness, measuring in situ electrical conductivity. As the film thickness increased, the island size was constant and then increased, while the number of islands first increased and then decreased. The proposed model may be useful for in situ study of the growth of ultrathin films prior to the onset of tunneling conductance.
AB - A model for the electrical conductance of a semiconductive substrate with an average thickness is proposed for a region of initial growth before the appearance of a tunneling effect. Based on this model, we propose 6 different growth modes according to the film thickness, measuring in situ electrical conductivity. As the film thickness increased, the island size was constant and then increased, while the number of islands first increased and then decreased. The proposed model may be useful for in situ study of the growth of ultrathin films prior to the onset of tunneling conductance.
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U2 - 10.1143/JJAP.43.6452
DO - 10.1143/JJAP.43.6452
M3 - Article
AN - SCOPUS:9144238403
SN - 0021-4922
VL - 43
SP - 6452
EP - 6456
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 9 A
ER -