Miniaturized CBCPW bandpass filter based on thin film polyimide on lossy silicon

Sang No Lee, Jong Gwan Yook

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


This letter reports a miniaturized conductor-backed coplanar waveguide (CBCPW) bandpass filter (BPF) based on a thin film polyimide layer coated on a lossy silicon. With a 20-μm-thick polyimide interface layer and back metallization, the interaction of electromagnetic fields with the lossy silicon substrate has been isolated, and as a result low-loss and low-dispersive CBCPW line has been obtained. The measured attenuation at 20 GHz is below 1.2 dB/cm, which is comparable with the CPW fabricated on GaAs. In addition, by using the proposed CBCPW geometry, a miniaturized Ku-band BPF was designed and its measured frequency response demonstrated excellent correlation with the predicted value which validated the performance of the proposed CBCPW geometry used for radio frequency integrated circuit interconnects and filter applications.

Original languageEnglish
Pages (from-to)546-548
Number of pages3
JournalIEEE Microwave and Wireless Components Letters
Issue number10
Publication statusPublished - 2006 Oct

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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