Micromachined tip-to-plate corona discharger with slit dielectric barrier for measuring the airborne particle number concentration

Hong Lae Kim; Sang Myun Lee; Chul Woo Park; Jungho Hwang; Yong Jun Kim

doi:10.1109/MEMSYS.2013.6474282

Micromachined tip-to-plate corona discharger with slit dielectric barrier for measuring the airborne particle number concentration

Hong Lae Kim, Sang Myun Lee, Chul Woo Park, Jungho Hwang, Yong Jun Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper reports a micromachined corona discharger with slit dielectric barrier for measuring the number concentration of airborne particle. The tip-to-plate corona discharger presented in our previous research only generates the corona discharge on the tip type electrode. However, the proposed corona discharger generates the corona discharge on the slit dielectric barrier as well as the tip type discharge electrode. The discharge characteristic and particle charging capability of the proposed corona discharger were experimentally examined. At the result, the corona current and induced current by charged particles were 3 times higher than those of the tip-to-pate micro corona discharger.

Original language	English
Title of host publication	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages	477-479
Number of pages	3
DOIs	https://doi.org/10.1109/MEMSYS.2013.6474282
Publication status	Published - 2013
Event	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China Duration: 2013 Jan 20 → 2013 Jan 24

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Country/Territory	Taiwan, Province of China
City	Taipei
Period	13/1/20 → 13/1/24

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2013.6474282

Cite this

Kim, H. L., Lee, S. M., Park, C. W., Hwang, J., & Kim, Y. J. (2013). Micromachined tip-to-plate corona discharger with slit dielectric barrier for measuring the airborne particle number concentration. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 477-479). [6474282] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2013.6474282

Kim, Hong Lae ; Lee, Sang Myun ; Park, Chul Woo et al. / Micromachined tip-to-plate corona discharger with slit dielectric barrier for measuring the airborne particle number concentration. IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. pp. 477-479 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{1bbcc43f19504236954884b2988b60c8,

title = "Micromachined tip-to-plate corona discharger with slit dielectric barrier for measuring the airborne particle number concentration",

abstract = "This paper reports a micromachined corona discharger with slit dielectric barrier for measuring the number concentration of airborne particle. The tip-to-plate corona discharger presented in our previous research only generates the corona discharge on the tip type electrode. However, the proposed corona discharger generates the corona discharge on the slit dielectric barrier as well as the tip type discharge electrode. The discharge characteristic and particle charging capability of the proposed corona discharger were experimentally examined. At the result, the corona current and induced current by charged particles were 3 times higher than those of the tip-to-pate micro corona discharger.",

author = "Kim, {Hong Lae} and Lee, {Sang Myun} and Park, {Chul Woo} and Jungho Hwang and Kim, {Yong Jun}",

year = "2013",

doi = "10.1109/MEMSYS.2013.6474282",

language = "English",

isbn = "9781467356558",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "477--479",

booktitle = "IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013",

note = "IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 ; Conference date: 20-01-2013 Through 24-01-2013",

}

Kim, HL, Lee, SM, Park, CW, Hwang, J & Kim, YJ 2013, Micromachined tip-to-plate corona discharger with slit dielectric barrier for measuring the airborne particle number concentration. in IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013., 6474282, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 477-479, IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013, Taipei, Taiwan, Province of China, 13/1/20. https://doi.org/10.1109/MEMSYS.2013.6474282

Micromachined tip-to-plate corona discharger with slit dielectric barrier for measuring the airborne particle number concentration. / Kim, Hong Lae; Lee, Sang Myun; Park, Chul Woo et al.
IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. p. 477-479 6474282 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Micromachined tip-to-plate corona discharger with slit dielectric barrier for measuring the airborne particle number concentration

AU - Kim, Hong Lae

AU - Lee, Sang Myun

AU - Park, Chul Woo

AU - Hwang, Jungho

AU - Kim, Yong Jun

PY - 2013

Y1 - 2013

N2 - This paper reports a micromachined corona discharger with slit dielectric barrier for measuring the number concentration of airborne particle. The tip-to-plate corona discharger presented in our previous research only generates the corona discharge on the tip type electrode. However, the proposed corona discharger generates the corona discharge on the slit dielectric barrier as well as the tip type discharge electrode. The discharge characteristic and particle charging capability of the proposed corona discharger were experimentally examined. At the result, the corona current and induced current by charged particles were 3 times higher than those of the tip-to-pate micro corona discharger.

AB - This paper reports a micromachined corona discharger with slit dielectric barrier for measuring the number concentration of airborne particle. The tip-to-plate corona discharger presented in our previous research only generates the corona discharge on the tip type electrode. However, the proposed corona discharger generates the corona discharge on the slit dielectric barrier as well as the tip type discharge electrode. The discharge characteristic and particle charging capability of the proposed corona discharger were experimentally examined. At the result, the corona current and induced current by charged particles were 3 times higher than those of the tip-to-pate micro corona discharger.

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DO - 10.1109/MEMSYS.2013.6474282

M3 - Conference contribution

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SN - 9781467356558

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 477

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BT - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013

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Y2 - 20 January 2013 through 24 January 2013

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Kim HL, Lee SM, Park CW, Hwang J , Kim YJ. Micromachined tip-to-plate corona discharger with slit dielectric barrier for measuring the airborne particle number concentration. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. p. 477-479. 6474282. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2013.6474282

Micromachined tip-to-plate corona discharger with slit dielectric barrier for measuring the airborne particle number concentration

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