Micromachined filters on synthesized substrates

R. F. Drayton, S. Pacheco, J. G. Yook, L. P.B. Katehi

Research output: Contribution to journalConference articlepeer-review

13 Citations (Scopus)


Effective frequency spectrum usage requires high performance filters with a sharp cut-off frequency and high stopband attenuation. Stepped impedance lowpass designs achieve this with large ratios of high and low impedance values. In high index materials, however, such as Si (11.7) and GaAs (12.9), these ratios are around 5 which significantly limit filter performance. This paper presents the use of Si micromachining to produce synthesized substrates with stepped-impedance low filter designs. Of the two designs, one offers a reduction of the low impedance value while the other offers an increase of the high impedance value to produce ZH/ZL ratios that are 1.5 to 2 times larger than conventional designs.

Original languageEnglish
Pages (from-to)1185-1188
Number of pages4
JournalIEEE MTT-S International Microwave Symposium Digest
Publication statusPublished - 1998
EventProceedings of the 1998 IEEE MTT-S International Microwave Symposium. Part 1 (of 3) - Baltimore, MD, USA
Duration: 1998 Jun 71998 Jun 12

All Science Journal Classification (ASJC) codes

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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