Micromachined cascade virtual impactor for aerodynamic size classification of airborne particles

Jwa Young Maeng; Dongho Park; Yong Ho Kim; Jungho Hwang; Yone Jun Kim

Micromachined cascade virtual impactor for aerodynamic size classification of airborne particles

Jwa Young Maeng, Dongho Park, Yong Ho Kim, Jungho Hwang, Yone Jun Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

10 Citations (Scopus)

Abstract

We report design, fabrication and experimental results of a micromachined cascade virtual impactor with flow rate distributor for classifying airborne particles according to their sizes. The fabricated device consists of two components: a cascade virtual impactor for classifying particles according to their own inertia, and a flow rate distributor to maintain specific flow rates at each channel. Proposed device is fabricated using polymer-based micromachining. Due to the flow rate distributor, only one external pump was used for controlling major flow rates and minor flow rates. DOS particles ranged from 100 to 600 nm and carbon particles from 0.6 to 10 μm were used for the classification experiments. Particle size distribution at the inlet and each minor flow were measured by SMPS for DOS particles and APS for carbon particles. Classification of airborne particles with 3 cut-off diameters is successfully demonstrated. The measured cut-off diameters were 135 nm, 1.9 μm, and 4.8 μm.

Original language	English
Title of host publication	Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
Pages	619-622
Number of pages	4
Publication status	Published - 2007
Event	20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan Duration: 2007 Jan 21 → 2007 Jan 25

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
Country/Territory	Japan
City	Kobe
Period	07/1/21 → 07/1/25

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

Maeng, J. Y., Park, D., Kim, Y. H., Hwang, J., & Kim, Y. J. (2007). Micromachined cascade virtual impactor for aerodynamic size classification of airborne particles. In Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007 (pp. 619-622). [4433121] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Maeng, Jwa Young ; Park, Dongho ; Kim, Yong Ho et al. / Micromachined cascade virtual impactor for aerodynamic size classification of airborne particles. Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. 2007. pp. 619-622 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{e99572f5c71f4a1d99f8bd13ba38c29d,

title = "Micromachined cascade virtual impactor for aerodynamic size classification of airborne particles",

abstract = "We report design, fabrication and experimental results of a micromachined cascade virtual impactor with flow rate distributor for classifying airborne particles according to their sizes. The fabricated device consists of two components: a cascade virtual impactor for classifying particles according to their own inertia, and a flow rate distributor to maintain specific flow rates at each channel. Proposed device is fabricated using polymer-based micromachining. Due to the flow rate distributor, only one external pump was used for controlling major flow rates and minor flow rates. DOS particles ranged from 100 to 600 nm and carbon particles from 0.6 to 10 μm were used for the classification experiments. Particle size distribution at the inlet and each minor flow were measured by SMPS for DOS particles and APS for carbon particles. Classification of airborne particles with 3 cut-off diameters is successfully demonstrated. The measured cut-off diameters were 135 nm, 1.9 μm, and 4.8 μm.",

author = "Maeng, {Jwa Young} and Dongho Park and Kim, {Yong Ho} and Jungho Hwang and Kim, {Yone Jun}",

year = "2007",

language = "English",

isbn = "1424409519",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "619--622",

booktitle = "Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007",

note = "20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 ; Conference date: 21-01-2007 Through 25-01-2007",

}

Maeng, JY, Park, D, Kim, YH, Hwang, J & Kim, YJ 2007, Micromachined cascade virtual impactor for aerodynamic size classification of airborne particles. in Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007., 4433121, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 619-622, 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, Kobe, Japan, 07/1/21.

Micromachined cascade virtual impactor for aerodynamic size classification of airborne particles. / Maeng, Jwa Young; Park, Dongho; Kim, Yong Ho et al.
Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. 2007. p. 619-622 4433121 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Micromachined cascade virtual impactor for aerodynamic size classification of airborne particles

AU - Maeng, Jwa Young

AU - Park, Dongho

AU - Kim, Yong Ho

AU - Hwang, Jungho

AU - Kim, Yone Jun

PY - 2007

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N2 - We report design, fabrication and experimental results of a micromachined cascade virtual impactor with flow rate distributor for classifying airborne particles according to their sizes. The fabricated device consists of two components: a cascade virtual impactor for classifying particles according to their own inertia, and a flow rate distributor to maintain specific flow rates at each channel. Proposed device is fabricated using polymer-based micromachining. Due to the flow rate distributor, only one external pump was used for controlling major flow rates and minor flow rates. DOS particles ranged from 100 to 600 nm and carbon particles from 0.6 to 10 μm were used for the classification experiments. Particle size distribution at the inlet and each minor flow were measured by SMPS for DOS particles and APS for carbon particles. Classification of airborne particles with 3 cut-off diameters is successfully demonstrated. The measured cut-off diameters were 135 nm, 1.9 μm, and 4.8 μm.

AB - We report design, fabrication and experimental results of a micromachined cascade virtual impactor with flow rate distributor for classifying airborne particles according to their sizes. The fabricated device consists of two components: a cascade virtual impactor for classifying particles according to their own inertia, and a flow rate distributor to maintain specific flow rates at each channel. Proposed device is fabricated using polymer-based micromachining. Due to the flow rate distributor, only one external pump was used for controlling major flow rates and minor flow rates. DOS particles ranged from 100 to 600 nm and carbon particles from 0.6 to 10 μm were used for the classification experiments. Particle size distribution at the inlet and each minor flow were measured by SMPS for DOS particles and APS for carbon particles. Classification of airborne particles with 3 cut-off diameters is successfully demonstrated. The measured cut-off diameters were 135 nm, 1.9 μm, and 4.8 μm.

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M3 - Conference contribution

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SN - 1424409519

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 619

EP - 622

BT - Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007

T2 - 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007

Y2 - 21 January 2007 through 25 January 2007

ER -

Maeng JY, Park D, Kim YH, Hwang J , Kim YJ. Micromachined cascade virtual impactor for aerodynamic size classification of airborne particles. In Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. 2007. p. 619-622. 4433121. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Micromachined cascade virtual impactor for aerodynamic size classification of airborne particles

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All Science Journal Classification (ASJC) codes

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