Microhardness and surface roughness of silicon carbide by chemical vapour deposition

Dong Joo Kim, Doo Jin Choi

Research output: Contribution to journalArticlepeer-review

27 Citations (Scopus)
Original languageEnglish
Pages (from-to)286-289
Number of pages4
JournalJournal of Materials Science Letters
Issue number4
Publication statusPublished - 1997

Bibliographical note

Funding Information:
The work was supported by the Ministry of Education research fund for advanced materials in 1995.

All Science Journal Classification (ASJC) codes

  • General Materials Science

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