Microfabricated torsional actuators using self-aligned plastic deformation of silicon

In this paper, we describe angular vertical-comb-drive torsional microactuators made in a new process that induces residual plastic deformation of single-crystal-silicon torsion bars. Critical dimensions of the vertically interdigitated moving-and fixed-comb actuators are self-aligned in the fabrication process and processed devices operate stably over a range of actuation voltages. We demonstrate MEMS scanning mirrors that resonate at 2.95 kHz and achieve optical scan angles up to 19.2 degrees with driving voltages of 40 V _dc plus 13V _pp. After continuous testing of five billion cycles at the maximum scanning angle, we do not observe any signs of degradation in the plastically deformed silicon torsion bars.