We report a novel low-cost and simple technique to fabricate micron-scaled pH sensors using Pd patterned structures. We utilized a combination of photolithography and a lift-off technique to fabricate a V-shaped 4-probe device from a continuous Pd film. The device could detect the pH of a buffer solution by electrolysis. The hydrogen gas (H2) in the solution generated during electrolysis was sensed by the Pd structure. Our results demonstrate that micron-scaled pH sensors based on V-shaped Pd structures can be used to quantitatively detect the pH of a wide pH range of buffer solutions.
Bibliographical noteFunding Information:
This work was supported by the Agency for Defense Development through the Defense Nano Technology Application Center, and KOSEF through the National Core Research Center for Nanomedical Technology (R15-2004-024-00000-0) and the Basic Research Program grant (R01-2008-000-21078-0), Seoul Research and Business Development Program (10816).
All Science Journal Classification (ASJC) codes
- General Materials Science
- General Physics and Astronomy