Micro-scale patterning of indium tin oxide film by spatially modulated pulsed Nd:YAG laser beam

Jinsoo Lee, Seongsu Kim, Myeongkyu Lee

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)


Here we demonstrate that indium tin oxide (ITO) films deposited on glass can be directly patterned by a spatially -modulated pulsed Nd-YAG laser beam (wavelength = 1064 nm, pulse width = 6 ns) incident onto the film. This method utilizes a pulsed laser-induced thermo-elastic force exerting on the film which plays a role to detach it from the substrate. Sharp-edged clean patterns with feature size as small as 4 μm could be obtained. The threshold pulse energy density for patterning was estimated to be ∼0.8 J/cm 2 for 150 nm-thick ITO film, making it possible to pattern over one square centimeter by a single pulse with energy of 850 mJ. Not only being free from photoresist and chemical etching steps, the presented method can also provide much higher throughput than the tradition photoablation process utilizing a tightly focused beam.

Original languageEnglish
Pages (from-to)9107-9111
Number of pages5
JournalApplied Surface Science
Issue number23
Publication statusPublished - 2012 Sept 15

Bibliographical note

Funding Information:
This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology (grant number: 2009-0081142 ) and by Seoul R&BD Program (ST090854).

All Science Journal Classification (ASJC) codes

  • General Chemistry
  • Condensed Matter Physics
  • General Physics and Astronomy
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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