Micro-patterning of silicon by frictional interaction and chemical reaction

Engineering

• Silicon 60%
• Fabrication 20%
• Microstructure 20%
• Micro Machining 20%
• Step Process 20%
• Micro-Electro-Mechanical System 20%
• Silicon Single Crystal 20%
• Surfaces 20%
• Demonstrates 20%
• Light Load 20%
• Basic Idea 20%

Chemistry

• Procedure 100%
• Chemical Reaction 40%
• Microstructure 20%
• Plastic Deformation 20%
• Surface 20%
• Etching 20%

Material Science

• Patterning 40%
• Microplastics 20%
• Surface 20%
• Etching 20%
• Microstructure 20%