Micro-nano hybrid structures with manipulated wettability using a two-step silicon etching on a large area

Engineering

• Nanohybrid 100%
• Silicon 66%
• Passivation Layer 11%
• Hydrophobic 11%
• Nanowire 11%
• Side Wall 11%
• Dry Etching 11%
• Enhancement 5%
• Fabrication 5%
• Etching Process 5%
• Nanoscale 5%
• Boiling Heat Transfer 5%
• Diameter Ratio 5%
• Surface Wettability 5%
• Layer Display 5%
• Performance 5%
• Large Area 5%
• Applications 5%
• Surfaces 5%
• Fields 5%
• Characteristics 5%
• Boiling Liquid 5%
• Roughness 5%
• Hierarchical Structure 5%

Chemistry

• Structure 38%
• Wetting 27%
• Procedure 16%
• Nanowire 11%
• Hydrophobic Surface 11%
• Roughness 11%
• Surface Area 5%
• 100-1 5%
• Surface 5%
• Synthesis (Chemical) 5%
• Polymer 5%
• Length 5%
• Application 5%
• Etching 5%
• Boiling 5%

Material Science

• Dry Etching 11%
• Contact Angle 11%
• Wet Etching 5%
• Surface 5%
• Etching 5%
• Boiling Liquid 5%