Micro-chemo-mechanical hydrogen sensor based on contact resistance of carbon nanotubes array

M. O. Kim; K. Lee; H. Na; D. S. Kwon; J. Choi; J. I. Lee; D. Baek; J. Kim

doi:10.1109/Transducers.2013.6627332

Micro-chemo-mechanical hydrogen sensor based on contact resistance of carbon nanotubes array

M. O. Kim, K. Lee, H. Na, D. S. Kwon, J. Choi, J. I. Lee, D. Baek, J. Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

We developed a micro-chemo-mechanical hydrogen sensor with novel sensing mechanism based on contact resistance change of carbon nanotubes array. The sensor is composed of two facing sets of carbon nanotubes (CNT) arrays as the detection material and palladium (Pd)-coated micro-cantilever fabricated on silicon-on-insulator (SOI) wafer. The Pd-silicon bimorph responds toward various concentration of hydrogen gas at room temperature. This micro-chemo-mechanical sensor reacted to 0.5% of hydrogen gas within 12 seconds and showed detection limit as low as 0.05%. It is much lower value than typical resistive-type chemo-mechanical hydrogen sensors.

Original language	English
Title of host publication	2013 Transducers and Eurosensors XXVII
Subtitle of host publication	The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages	2576-2579
Number of pages	4
DOIs	https://doi.org/10.1109/Transducers.2013.6627332
Publication status	Published - 2013
Event	2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain Duration: 2013 Jun 16 → 2013 Jun 20

Publication series

Name	2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Other

Other	2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Country/Territory	Spain
City	Barcelona
Period	13/6/16 → 13/6/20

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/Transducers.2013.6627332

Cite this

Kim, M. O., Lee, K., Na, H., Kwon, D. S., Choi, J., Lee, J. I., Baek, D., & Kim, J. (2013). Micro-chemo-mechanical hydrogen sensor based on contact resistance of carbon nanotubes array. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 2576-2579). Article 6627332 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). https://doi.org/10.1109/Transducers.2013.6627332

Kim, M. O. ; Lee, K. ; Na, H. et al. / Micro-chemo-mechanical hydrogen sensor based on contact resistance of carbon nanotubes array. 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. pp. 2576-2579 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013).

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title = "Micro-chemo-mechanical hydrogen sensor based on contact resistance of carbon nanotubes array",

abstract = "We developed a micro-chemo-mechanical hydrogen sensor with novel sensing mechanism based on contact resistance change of carbon nanotubes array. The sensor is composed of two facing sets of carbon nanotubes (CNT) arrays as the detection material and palladium (Pd)-coated micro-cantilever fabricated on silicon-on-insulator (SOI) wafer. The Pd-silicon bimorph responds toward various concentration of hydrogen gas at room temperature. This micro-chemo-mechanical sensor reacted to 0.5% of hydrogen gas within 12 seconds and showed detection limit as low as 0.05%. It is much lower value than typical resistive-type chemo-mechanical hydrogen sensors.",

author = "Kim, {M. O.} and K. Lee and H. Na and Kwon, {D. S.} and J. Choi and Lee, {J. I.} and D. Baek and J. Kim",

year = "2013",

doi = "10.1109/Transducers.2013.6627332",

language = "English",

isbn = "9781467359818",

series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",

pages = "2576--2579",

booktitle = "2013 Transducers and Eurosensors XXVII",

note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",

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Kim, MO, Lee, K, Na, H, Kwon, DS, Choi, J, Lee, JI, Baek, D & Kim, J 2013, Micro-chemo-mechanical hydrogen sensor based on contact resistance of carbon nanotubes array. in 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013., 6627332, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, pp. 2576-2579, 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, Barcelona, Spain, 13/6/16. https://doi.org/10.1109/Transducers.2013.6627332

Micro-chemo-mechanical hydrogen sensor based on contact resistance of carbon nanotubes array. / Kim, M. O.; Lee, K.; Na, H. et al.
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 2576-2579 6627332 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Kim, M. O.

AU - Lee, K.

AU - Na, H.

AU - Kwon, D. S.

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AU - Lee, J. I.

AU - Baek, D.

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AB - We developed a micro-chemo-mechanical hydrogen sensor with novel sensing mechanism based on contact resistance change of carbon nanotubes array. The sensor is composed of two facing sets of carbon nanotubes (CNT) arrays as the detection material and palladium (Pd)-coated micro-cantilever fabricated on silicon-on-insulator (SOI) wafer. The Pd-silicon bimorph responds toward various concentration of hydrogen gas at room temperature. This micro-chemo-mechanical sensor reacted to 0.5% of hydrogen gas within 12 seconds and showed detection limit as low as 0.05%. It is much lower value than typical resistive-type chemo-mechanical hydrogen sensors.

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Kim MO, Lee K, Na H, Kwon DS, Choi J, Lee JI et al. Micro-chemo-mechanical hydrogen sensor based on contact resistance of carbon nanotubes array. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 2576-2579. 6627332. (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). doi: 10.1109/Transducers.2013.6627332

Micro-chemo-mechanical hydrogen sensor based on contact resistance of carbon nanotubes array

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