MEMS micromirror characterization in space environments

Byung Wook Yoo, Jae Hyoung Park, I. H. Park, Jik Lee, Minsoo Kim, Joo Young Jin, Jin A. Jeon, Sug Whan Kim, Yong Kweon Kim

Research output: Contribution to journalArticlepeer-review

26 Citations (Scopus)


This paper describes MEMS micromirror characterization in space environments associated with our space applications in earth observation from the International Space Station and earth's orbit satellite. The performance of the micromirror was tested for shock and vibration, stiction, outgassing from depressurization and heating, and electrostatic charging effects. We demonstrated that there is no degradation of the micromirror performance after the space environment tests. A test bed instrument equipped with the micromirrors was delivered and tested in the ISS. The results demonstrate that the proposed micromirrors are suitable for optical space systems.

Original languageEnglish
Pages (from-to)3370-3380
Number of pages11
JournalOptics Express
Issue number5
Publication statusPublished - 2009 Mar 2

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics


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