MEMS-Based Gas Sensor Using PdO-Decorated TiO2 Thin Film for Highly Sensitive and Selective H2 Detection with Low Power Consumption

Seungmin Kwak; Young Seok Shim; Yong Kyoung Yoo; Jin Hyung Lee; Inho Kim; Jinseok Kim; Kyu Hyoung Lee; Jeong Hoon Lee

doi:10.1007/s13391-018-0030-5

MEMS-Based Gas Sensor Using PdO-Decorated TiO₂ Thin Film for Highly Sensitive and Selective H₂ Detection with Low Power Consumption

Seungmin Kwak, Young Seok Shim, Yong Kyoung Yoo, Jin Hyung Lee, Inho Kim, Jinseok Kim, Kyu Hyoung Lee, Jeong Hoon Lee

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

Abstract: We report a micromachined H₂ sensor that is composed of a Pt micro-heater, low-stress insulating layer (SiO₂/SiN_x/SiO₂), Pt-interdigitated electrodes, and gas sensing materials. Three types of Pt micro-heater are designed as function of electrode width, and their thermal properties are systematically analyzed by finite element modeling FEM with infrared camera. The power consumptions when the surface temperature reached 150, 200, 250, and 300 °C are calculated to approximately 33, 48, 67 and 85 mW, respectively. The response of the PdO nanoparticles-decorated TiO₂ thin films to H₂ is much higher than those of other gases such as CH₄ and CO at 200 °C (48 mW). Further, the response time is reduced to approximately 3 s. The enhancement of gas sensing properties is related to well-designed micro-heater and catalytic effects of PdO nanoparticles such as electronic and chemical sensitization. These results suggest that the PdO nanoparticles-decorated TiO₂ thin film, namely MEMS-based H₂ sensors are very promising for use in IoT application to improve the quality of human’s life. Graphical Abstract: [Figure not available: see fulltext.].

Original language	English
Pages (from-to)	305-313
Number of pages	9
Journal	Electronic Materials Letters
Volume	14
Issue number	3
DOIs	https://doi.org/10.1007/s13391-018-0030-5
Publication status	Published - 2018 May 1

Bibliographical note

Funding Information:
Acknowledgements This work was supported by a National Research Foundation of Korea grant funded by the Korean government (MEST; NRF-2015R1D1A1A01059806) and by a grant of the Korea Health Technology R&D Project through the Korea Health Industry Development Institute (KHIDI), funded by the Ministry of Health and Welfare, Republic of Korea (Grant No.: HI16C0272).

Publisher Copyright:
© 2018, The Korean Institute of Metals and Materials.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials

Access to Document

10.1007/s13391-018-0030-5

Cite this

@article{428c33dd1941473eadbe21211ab5defc,

title = "MEMS-Based Gas Sensor Using PdO-Decorated TiO2 Thin Film for Highly Sensitive and Selective H2 Detection with Low Power Consumption",

abstract = "Abstract: We report a micromachined H2 sensor that is composed of a Pt micro-heater, low-stress insulating layer (SiO2/SiNx/SiO2), Pt-interdigitated electrodes, and gas sensing materials. Three types of Pt micro-heater are designed as function of electrode width, and their thermal properties are systematically analyzed by finite element modeling FEM with infrared camera. The power consumptions when the surface temperature reached 150, 200, 250, and 300 °C are calculated to approximately 33, 48, 67 and 85 mW, respectively. The response of the PdO nanoparticles-decorated TiO2 thin films to H2 is much higher than those of other gases such as CH4 and CO at 200 °C (48 mW). Further, the response time is reduced to approximately 3 s. The enhancement of gas sensing properties is related to well-designed micro-heater and catalytic effects of PdO nanoparticles such as electronic and chemical sensitization. These results suggest that the PdO nanoparticles-decorated TiO2 thin film, namely MEMS-based H2 sensors are very promising for use in IoT application to improve the quality of human{\textquoteright}s life. Graphical Abstract: [Figure not available: see fulltext.].",

author = "Seungmin Kwak and Shim, {Young Seok} and Yoo, {Yong Kyoung} and Lee, {Jin Hyung} and Inho Kim and Jinseok Kim and Lee, {Kyu Hyoung} and Lee, {Jeong Hoon}",

note = "Funding Information: Acknowledgements This work was supported by a National Research Foundation of Korea grant funded by the Korean government (MEST; NRF-2015R1D1A1A01059806) and by a grant of the Korea Health Technology R&D Project through the Korea Health Industry Development Institute (KHIDI), funded by the Ministry of Health and Welfare, Republic of Korea (Grant No.: HI16C0272). Publisher Copyright: {\textcopyright} 2018, The Korean Institute of Metals and Materials.",

year = "2018",

month = may,

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doi = "10.1007/s13391-018-0030-5",

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T1 - MEMS-Based Gas Sensor Using PdO-Decorated TiO2 Thin Film for Highly Sensitive and Selective H2 Detection with Low Power Consumption

AU - Kwak, Seungmin

AU - Shim, Young Seok

AU - Yoo, Yong Kyoung

AU - Lee, Jin Hyung

AU - Kim, Inho

AU - Kim, Jinseok

AU - Lee, Kyu Hyoung

AU - Lee, Jeong Hoon

N1 - Funding Information: Acknowledgements This work was supported by a National Research Foundation of Korea grant funded by the Korean government (MEST; NRF-2015R1D1A1A01059806) and by a grant of the Korea Health Technology R&D Project through the Korea Health Industry Development Institute (KHIDI), funded by the Ministry of Health and Welfare, Republic of Korea (Grant No.: HI16C0272). Publisher Copyright: © 2018, The Korean Institute of Metals and Materials.

PY - 2018/5/1

Y1 - 2018/5/1

N2 - Abstract: We report a micromachined H2 sensor that is composed of a Pt micro-heater, low-stress insulating layer (SiO2/SiNx/SiO2), Pt-interdigitated electrodes, and gas sensing materials. Three types of Pt micro-heater are designed as function of electrode width, and their thermal properties are systematically analyzed by finite element modeling FEM with infrared camera. The power consumptions when the surface temperature reached 150, 200, 250, and 300 °C are calculated to approximately 33, 48, 67 and 85 mW, respectively. The response of the PdO nanoparticles-decorated TiO2 thin films to H2 is much higher than those of other gases such as CH4 and CO at 200 °C (48 mW). Further, the response time is reduced to approximately 3 s. The enhancement of gas sensing properties is related to well-designed micro-heater and catalytic effects of PdO nanoparticles such as electronic and chemical sensitization. These results suggest that the PdO nanoparticles-decorated TiO2 thin film, namely MEMS-based H2 sensors are very promising for use in IoT application to improve the quality of human’s life. Graphical Abstract: [Figure not available: see fulltext.].

AB - Abstract: We report a micromachined H2 sensor that is composed of a Pt micro-heater, low-stress insulating layer (SiO2/SiNx/SiO2), Pt-interdigitated electrodes, and gas sensing materials. Three types of Pt micro-heater are designed as function of electrode width, and their thermal properties are systematically analyzed by finite element modeling FEM with infrared camera. The power consumptions when the surface temperature reached 150, 200, 250, and 300 °C are calculated to approximately 33, 48, 67 and 85 mW, respectively. The response of the PdO nanoparticles-decorated TiO2 thin films to H2 is much higher than those of other gases such as CH4 and CO at 200 °C (48 mW). Further, the response time is reduced to approximately 3 s. The enhancement of gas sensing properties is related to well-designed micro-heater and catalytic effects of PdO nanoparticles such as electronic and chemical sensitization. These results suggest that the PdO nanoparticles-decorated TiO2 thin film, namely MEMS-based H2 sensors are very promising for use in IoT application to improve the quality of human’s life. Graphical Abstract: [Figure not available: see fulltext.].

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