Material characterization and process modeling issues of high-k dielectrics for FET applications

Material Science

• Field Effect Transistors 100%
• Dielectric Material 83%
• Thin Films 50%
• ZnO 16%
• Characterization 16%
• Polyethylene 16%
• Molecular Beam Epitaxy 16%
• Devices 16%
• Electrical Property 16%
• Materials Processing 16%
• Materials Characterization 16%

Engineering

• Thin Films 50%
• Characteristics 50%
• Nanowire 33%
• Annealing Effect 33%
• Applications 33%
• Process Modeling 33%
• Atomic Layer Deposition 16%
• Dielectric Layer 16%
• Metallizations 16%
• Process Variation 16%
• Gas Environment 16%
• Networks 16%
• Processing 16%